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  6. Semiconductor industry process filter - Metal impurity removal filter for organic solvents

Semiconductor industry process filter - Metal impurity removal filter for organic solvents

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last updated:Mar 08, 2022

日本コベッタ
日本コベッタ
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A wide range of products from general ion-exchange type metal removal membranes to metal removal membranes specialized for semiconductor applications.

Iongard SL purifier Ion exchange type metal removal for organic solvents Nylonpolar Purifier Cobetter's original metal removal membrane. Uses a surface-modified nylon-based membrane. Ideal for lithography materials as it does not generate acids. Iongard Polar Purifier Effective metal removal for polar organic solvents Cemdeion Purifier Surface-modified Teflon-based membrane. Usable for IPA, which is used as a final cleaning solution, and for organic solvents that require chemical resistance.

    Resist DeviceEtching Equipment
カートリッジ写真.PNG

Semiconductor industry process filter - Metal impurity removal filter for organic solvents

カートリッジ写真.PNG
カートリッジ写真.PNG

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basic information

For details, please contact our company. Each filter can be supplied with various capsules and cartridges. It is compatible with many existing products. We can provide suggestions tailored to various applications.

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Applications/Examples of results

Examples of Nylonpolar applications Metal removal from PGMEA (widely used in lithography chemicals) Metal removal from organic solvents containing PAG (photoacid generator) and resin Chemdeion Metal removal from IPA solvent Iongard polar Purifier Metal removal from NMP solvent

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日本コベッタ

日本コベッタ

Electronic Components and Semiconductors

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Cobetter is a cutting-edge company with innovative filtration and purification solutions for the global semiconductor integrated circuit manufacturing and biopharmaceutical industries, achieved through the research and development of various precision filtration membranes, nanofibers, and ultrafiltration membranes. Headquartered in Hangzhou, Zhejiang Province, China, it has subsidiaries in five locations: Shanghai, China; Japan; South Korea; Taiwan; and Singapore, serving over 28,000 customers across 106 countries. Cobetter Japan is one of the subsidiaries established in February 2019. Currently, the company employs over 4,000 people, with more than 1,000 engineers, and has independently developed over a dozen types of innovative filtration materials, holding more than 300 patented technologies. In addition to the development of filtration materials, Cobetter has a comprehensive filtration and separation industrial chain that includes the development of filter packages suitable for various applications, production of single-use bags (2D/3D), clean drums, and the design, manufacturing, and verification of SUS housings and filtration systems.

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