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Small-sized, high-flow PTFE gas filter "Megaflow"

Ensure a flow rate of up to 1,000 lpm.

■Compact and High Flow Rate This is a standard-sized inline gas filter that allows for high flow rate filtration. High Particle Removal Performance ■It efficiently removes particles larger than 0.003μm. ■Excellent Corrosion Resistance All filter media and support materials are made of fluoropolymer, and the housing is made of SUS316L material. *It can be used for a wide range of applications, including semiconductor manufacturing equipment and bulk gas supply lines for PV.

  • CVD Equipment
  • Etching Equipment
  • Evaporation Equipment

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