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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. CVD Equipment
  6. Small-sized, high-flow PTFE gas filter "Megaflow"

Small-sized, high-flow PTFE gas filter "Megaflow"

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STF-MF1 Mega Flow Series

last updated:Apr 27, 2016

ピー・ジェイ
ピー・ジェイ
  • Official site

Ensure a flow rate of up to 1,000 lpm.

■Compact and High Flow Rate This is a standard-sized inline gas filter that allows for high flow rate filtration. High Particle Removal Performance ■It efficiently removes particles larger than 0.003μm. ■Excellent Corrosion Resistance All filter media and support materials are made of fluoropolymer, and the housing is made of SUS316L material. *It can be used for a wide range of applications, including semiconductor manufacturing equipment and bulk gas supply lines for PV.

    CVD EquipmentEtching EquipmentEvaporation Equipment
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Small-sized, high-flow PTFE gas filter "Megaflow"

img.jpg
img.jpg
  • Related Link - http://pureron.co.jp/product/stf-mf1/index.html

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basic information

Filtration precision: 0.003μm Common operating pressure: less than 1MPa Maximum allowable positive differential pressure: 0.7MPa (20℃) Maximum allowable negative differential pressure: 0.3MPa (20℃) Maximum allowable temperature: 120℃ (inert gas) External leakage rate: less than 2×10^-11 Pa·m³/sec Components: Housing: SUS316L (electropolished) Surface roughness: Rmax less than 0.5μm Filter media: PTFE Support: PFA Fittings: 1/4", 3/8", 1/2" VCR (standard), Swagelok, others

Price range

P2

Delivery Time

P4

Applications/Examples of results

Various gas supply piping for semiconductor/PV/FPD manufacturing equipment Various gas supply piping for semiconductor/PV/FPD manufacturing plants

Line up(5)

Model number overview
STF-MF1-02VR・P 1/4
STF-MF1-02SW・P 1/4
STF-MF1-03SW・P 3/8
STF-MF1-04VR・P 1/2
STF-MF1-04SW・P 1/2

Company information

ピー・ジェイ

ピー・ジェイ

Electronic Components and Semiconductors

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PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.

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