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  6. Ultrasonic Megasonic Cleaning Device (Single Sheet Cleaning / Bath Tank Type Cleaning)

Ultrasonic Megasonic Cleaning Device (Single Sheet Cleaning / Bath Tank Type Cleaning)

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Sonosys

last updated:Oct 01, 2026

ティックコーポレーション 本社
ティックコーポレーション 本社
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Leave the latest ultrasonic cleaning to Sonosys.

Ultrasonic Cleaning Spray Nozzle For non-contact single substrate cleaning, we offer a megasonic nozzle with either a single nozzle, dual nozzle, or triple channel, and any combination of frequencies ranging from 600kHz to a maximum of 9MHz. The transducer of this megasonic nozzle generates megasonics and sends them through a fluid (such as pure water) to clean the surface of the substrate. Megasonic Immersion Transducer This is a megasonic immersion transducer with frequencies of 400kHz, 600kHz, 1MHz, and 2MHz. A sealed transducer made of stainless steel or plastic (e.g., PP, PVDF, or PFA) is installed at the bottom or side of an existing tank. In addition to standard systems for substrate sizes of 4", 6", and 8", custom immersion transducers are also available. The highly adaptable configuration allows the megasonic system to be used in bath-tank cleaning processes, improving cost-effectiveness. Frequencies available are 400kHz, 600kHz, 1MHz, and 2MHz.

    CVD EquipmentCMP EquipmentPhotomask
ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg

Ultrasonic Megasonic Cleaning Device (Single Sheet Cleaning / Bath Tank Type Cleaning)

ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg
ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg 超音波洗浄装置(バス・タンク式).jpeg Triple-nozzle-ecf5619c.jpg
  • Related Link - https://www.youtube.com/playlist?list=PLFwJbGQJIS9…
  • Special site - Product/service details - https://pr.mono.ipros.com/ticjapan/product/

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Cleaning of semiconductor wafers, photomasks, and MEMS.

catalog(13)

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Ultrasonic cleaning spray nozzle (single) 1~5MHz

Ultrasonic cleaning spray nozzle (single) 1~5MHz

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Ultrasonic cleaning spray nozzle single (600kHz)

Ultrasonic cleaning spray nozzle single (600kHz)

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Ultrasonic cleaning spray nozzle Duel (type with 2 nozzles included)

Ultrasonic cleaning spray nozzle Duel (type with 2 nozzles included)

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Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of PVDF)

Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of PVDF)

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Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of PVDF)

Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of PVDF)

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Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of stainless steel)

Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of stainless steel)

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Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of stainless steel)

Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of stainless steel)

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Sonosys Company Overview (Ultrasonic Cleaning Equipment)

Sonosys Company Overview (Ultrasonic Cleaning Equipment)

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[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

TECHNICAL
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Next-generation digital generator for single nozzle type that improves the precision and manageability of megasonic cleaning.

Next-generation digital generator for single nozzle type that improves the precision and manageability of megasonic cleaning.

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Next-generation digital generator with dual nozzle type that improves the precision and manageability of megasonic cleaning.

Next-generation digital generator with dual nozzle type that improves the precision and manageability of megasonic cleaning.

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Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

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Mega Sonic Ultrasonic Cleaning Spray Nozzle Triple (Type with 3 Nozzles Included)

Mega Sonic Ultrasonic Cleaning Spray Nozzle Triple (Type with 3 Nozzles Included)

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News about this product(11)

Announcement of the product page launch for the SONOSYS Megasonic Cleaning Nozzle System | Precision Cleaning for Semiconductors and MEMS

  • Company news

We are pleased to announce that Tick Corporation has launched a product introduction page for the SONOSYS megasonic cleaning nozzle system. The megasonic cleaning technology from SONOSYS utilizes high-frequency energy ranging from 600 kHz to 9 MHz to precisely remove fine particles while minimizing damage to microstructures such as semiconductor wafers, photomasks, and MEMS. The new page features the characteristics of single, double, and triple nozzles, as well as applications for semiconductors, MEMS, optical components, and LCD/FPD substrates. If you are considering fine particle removal, precision cleaning using ultra-pure water (DI Water), or megasonic cleaning at frequencies such as 600 kHz or 1 MHz, please take a look.

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The NHK program "The Wall of Truth" will feature a video of semiconductor wafer cleaning provided by our company.

  • Company news

We are pleased to announce that a video provided by Tick Corporation showcasing semiconductor wafer cleaning will be featured in the NHK program "The Wall of Truth." The theme for this episode is "The Truth of Water (tentative)." The program is scheduled to briefly introduce the process of cleaning wafers with pure water during semiconductor manufacturing. Our company offers cleaning and spraying technologies, including megasonic cleaning, for the semiconductor and electronic components sectors. We are truly honored that our footage will be utilized in the production of this NHK program. Broadcast schedule: September 12, 2026 (Saturday) from 8:30 PM to 8:59 PM (tentative). For more details about the program, please visit the official NHK "The Wall of Truth" page. https://www.nhk.jp/g/ts/N8JX1V6V69/ *Please note that the broadcast date and content may be subject to change.

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Mega Sonic Cleaning Device (Single)

Announcement of the release of the latest leaflet for the SONOSYS Corporation's megasonic cleaning device.

  • Catalog news

We have updated the product leaflet for the SONOSYS megasonic cleaning device from Germany to the latest version. SONOSYS's megasonic cleaning technology is a non-contact precision cleaning technique that efficiently removes fine particles by transmitting high-frequency ultrasonic energy through liquids such as pure water (DI Water) to the surface of the target object. It is particularly suitable for the precision cleaning of products with fine structures, such as semiconductor wafers, photomasks, MEMS, various substrates, and optical components, and is utilized in various fields that require high cleanliness, starting with semiconductor manufacturing processes. SONOSYS offers a range of frequencies depending on the application and the particles to be removed, as well as a megasonic nozzle system that accommodates various cleaning conditions, including Single Nozzle, Dual Nozzle, and Triple Nozzle. Customers who have challenges such as "wanting to remove fine particles from wafers," "wanting to clean photomasks and MEMS while minimizing damage," or "wanting to review existing cleaning processes" are encouraged to take a look at the latest leaflet.

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The website of the ultrasonic spray nozzle manufacturer "Sonaer" has been renewed.

  • Company news

The website of the ultrasonic spray nozzle manufacturer "Sonaer" has been renewed. Compared to the previous website, product browsing has improved, and we have also started offering a new system. If you are interested, please feel free to contact us.

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Companynews list (362)

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ティックコーポレーション

ティックコーポレーション 本社

Machine elements and parts

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Tick Corporation is committed to providing products that contribute to solving various issues faced by companies, such as improving production efficiency, enhancing cost efficiency, improving quality, and considering environmental conservation. We have been widely collecting product information from around the world and providing products that meet market needs. In the future, we will continue to develop and deliver products that contribute to rationalization and particularly to environmental conservation, which has become increasingly stringent in recent years. ◇◆Main Products◇◆ - Precision industrial spray nozzles - Agricultural spray nozzles - Air nozzles / Air knives - Special spray nozzles - Tank cleaning nozzles - Blowers - Ultrasonic spray nozzles (Nebulizers / Atomizers) - Ultrasonic cleaning devices - Air conveying devices - Ventilators - Plastic connectors - Cutting torches (nozzles for gas cutters) - Latex testers - In-house manufactured tubing pumps (dispensers) - Syringe pumps

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