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Plasma Indicator [PLAZMARK for Ar Cleaning]

Achieving high sensitivity! An indicator capable of soft Ar plasma treatment and short-time processing.

The "PLAZMARK Ar Cleaning Type" is a plasma indicator that can be used to evaluate the effectiveness of cleaning and pretreatment processes by utilizing color materials that are sensitive to discoloration in strongly ionic plasmas, such as argon plasma. Additionally, a high-sensitivity type indicator has been commercialized to enhance the discoloration sensitivity that was previously only available in the "Ar Cleaning Type." As a result, it is now possible to use this indicator even for soft Ar plasma treatments and short-duration treatments, which were previously difficult to evaluate. 【Features】 ■ Achieves high sensitivity ■ Simple operation by just placing it in the device ■ Immediate color judgment after processing ■ Gradual color changes allow for detailed evaluation of in-plane distribution ■ Reduces costs as expensive evaluation equipment is not required *For more details, please refer to the catalog or feel free to contact us.

  • Other laboratory equipment and containers

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Indicator "PLAZMARK Ar Cleaning Use" <Card Type>

Optimized for ionic plasma detection! A card-type device that can be easily installed in areas of interest.

The "PLAZMARK Ar Cleaning Use" is a card-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning. It can efficiently detect ionic plasma such as Ar and He, which are hard to detect with O2 cleaning. In mixed systems with radical-based plasma or gases that serve as radical sources, O2 cleaning is more suitable. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Available in three shapes to suit your needs ■ Widely usable in processes such as semiconductor back-end operations *For more details, please refer to the related links or feel free to contact us.

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What is the Plasma Indicator PLAZMARK?

Introducing an evaluation tool using functional color materials that change color due to radical ions.

We would like to introduce our plasma indicator, 'PLAZMARK'. This product is an evaluation tool that uses functional color materials that change color due to active species (radicals and ions) in the plasma. It continuously changes color according to the plasma intensity, allowing for a detailed assessment of the plasma treatment effect. 【Features】 ■ Continuously changes color according to plasma intensity ■ Allows for a detailed evaluation of the plasma treatment effect *For more details, please refer to the related links or feel free to contact us.

  • Plasma Generator
  • Evaluation Board

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Plasma Indicator "PLAZMARK Ultra High Sensitivity Type for Atmospheric Pressure"

Ultra-high sensitivity for atmospheric pressure plasma is here! Compatible with mild plasma.

The "PLAZMARK Ultra High Sensitivity Type for Atmospheric Pressure" is a plasma indicator with a short processing time. In a comparison of discoloration samples and color differences after repeated mild plasma treatment, the discoloration speed is more than three times faster than previous high sensitivity types. We offer two shapes: a "Long Label Type" that can be attached, and a "Sheet Type" that allows for distribution evaluation at once. 【Suitable for the following processes】 ■ Fast scan speed (short processing time) ■ Low plasma power ■ Does not discolor with the current high sensitivity No. 41 *For more details, please refer to the related links or feel free to contact us.

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Indicator "PLAZMARK Ar Cleaning Use" <Label Type>

Label type that can be attached like a sticker! Widely usable in semiconductor back-end processes and more.

The "PLAZMARK Ar Cleaning Use" is a label-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning methods. It can efficiently detect ionic plasma such as Ar and He, which are hard to detect with O2 cleaning. In addition to this product, we offer three shapes: a "card type" that can be easily installed in areas of interest, and a "sheet type" that can capture distribution over a large area. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Three shapes to choose from according to your needs ■ Widely usable in processes such as semiconductor back-end *For more details, please refer to the related links or feel free to contact us.

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Indicator "PLAZMARK Ar Cleaning Type" <Sheet Type>

Efficiently detectable ionic plasma that is difficult to detect with O2 cleaning!

The "PLAZMARK Ar Cleaning Use" is a sheet-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning. It can be used in a wide range of scenarios, including surface modification before plating and cleaning before underfill after component mounting. For plasma primarily composed of radicals or in mixed systems with gases that serve as radical sources, O2 cleaning is more suitable. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Three shapes available to choose from according to your needs ■ Widely usable in processes such as semiconductor back-end operations *For more details, please refer to the related links or feel free to contact us.

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