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metal Product List

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DP-F Non-Metal: Diaphragm Pump "DP-FsE Series"

DP-F Non-Metal: Diaphragm Pump "DP-FsE Series"

Electric Switch Diaphragm Pump for Semiconductor Industry DP-FsE Series

DP-F Non-Metal Series: For the Semiconductor Industry Electric Switching Diaphragm Pump DP-FsE Series 【Features】 ■ A resin-type pump that uses fluororesin (PTFE, PFA) for all wetted parts, including the diaphragm and the pump body ■ Excellent corrosion resistance against strong acids and strong alkalis ■ Suitable for environments with temperature changes and for the transfer of CMP slurry ■ Equipped with a fiber optic stroke sensor, allowing for explosion-proof external electronic control *For more details, please contact us.

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DP-F Non-Metal DP-FE/D Series (External Electronic Control Type)

DP-F Non-Metal DP-FE/D Series (External Electronic Control Type)

Diaphragm pump for the semiconductor industry (externally controlled type)

DP-F Non-Metal Series: For the Semiconductor Industry Electric Switching DP-FE/D Series (External Electronic Control Type) 【Features】 ■ Model compatible with semiconductor processes ■ Non-metal, explosion-proof model with a built-in fiber optic stroke sensor in the pump ■ A proximity sensor detects the stroke end of the diaphragm, and the controller receiving the sensor signal controls a center exhaust type 3-position 5-port solenoid valve to perform reciprocating motion ■ Reliable operation with stable performance even at low stroke *For more details, please contact us.

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