Ultra-high purity diaphragm valve. Capable of approximately 100 million open/close cycles (under our test conditions) for atomic layer deposition (ALD) and high-speed switching (less than 5ms).
The Ultra Fast Series is designed for high-purity processes that require high-speed opening and closing at high temperatures, operating stably under precisely the same conditions, as exemplified by atomic layer deposition (ALD process) applications. It employs a unique flow control mechanism (patent pending US61/910,079) that allows for fine adjustments to maintain accurate flow rates during use.
<Features>
- High-speed valve opening and closing (valve response time: less than 5 ms)
- Ultra-long lifespan (passed 100 million opening and closing tests)
- Pressure resistance: Vacuum to 1 MPa (150 psi)
- Body material: SS316L VAR or VIM/VAR (compliant with SEMI F20-0305)
- Operating temperature range: -10 to 120°C (standard bonnet)
-10 to 200°C (extended bonnet)
- Sizes: 1/4", 1/2"
- Surface finish (average): 5 microinches
- Valve types: 2-port, 3-port, 4-port
- Optional thermocouple and heater cartridge hole processing available
- Optional solenoid valve and limit switch compatibility
*For more details, please download the PDF or feel free to contact us.
