Achieving high performance, compactness, and low cost! Ideal for organic metal-based semiconductor processes that require uniform heat distribution.
The "high-temperature (250℃) compatible valve" can be used at 250℃ by making all valve components fully metallic.
Thanks to its unique design, it minimizes the drop in Cv value in high-temperature environments, achieving high performance, compactness, and low cost.
Additionally, not only the gas-contacting parts but all components of the valve, including the actuator, can be used in high-temperature environments, making it suitable for processes that require uniform heat distribution in organometallic systems.
【Features】
■ All valve components are fully metallic, allowing use at 250℃
■ Minimizes the drop in Cv value, achieving high performance, compactness, and low cost
■ All components of the valve, including the actuator, can be used in high-temperature environments
■ Suitable for processes that require uniform heat distribution in organometallic systems
*KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.
