Indicator "PLAZMARK Ar Cleaning Use" <Card Type>
Optimized for ionic plasma detection! A card-type device that can be easily installed in areas of interest.
The "PLAZMARK Ar Cleaning Use" is a card-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning. It can efficiently detect ionic plasma such as Ar and He, which are hard to detect with O2 cleaning. In mixed systems with radical-based plasma or gases that serve as radical sources, O2 cleaning is more suitable. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Available in three shapes to suit your needs ■ Widely usable in processes such as semiconductor back-end operations *For more details, please refer to the related links or feel free to contact us.
- Company：サクラクレパス PI事業部
- Price：Other
