[Surface Treatment] Plasma Erosion Resistance Related to Semiconductor Manufacturing Equipment
By coating parts used in vacuum chambers related to semiconductor manufacturing equipment with yttrium thermal spray, plasma erosion resistance is imparted.
■Thermal spray material: Yttria ■Spraying method: Plasma spraying ■Construction method: Plasma erosion resistance ■Construction achievements: Semiconductor manufacturing equipment related
- Company:富士岐工産
- Price:Other