Vacuum-compatible 5nm feedback stage with 20mm operation.
High-performance positioning stage with 5nm resolution using a linear encoder, usable in a vacuum.
Since the positioning stage is equipped with outgassing countermeasures, it can be directly introduced into the vacuum chamber. It features full closed-loop control based on the position information from the built-in optical linear encoder, providing high-precision repeatability in positioning performance. It can operate with a 20mm stroke at a resolution of 5nm.
- Company：シグマ光機
- Price：Other
