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  6. Positioning challenges in a vacuum environment. List of PI's vacuum-compatible products.

Positioning challenges in a vacuum environment. List of PI's vacuum-compatible products.

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Products compatible with vacuum environments, from hexapods to stages and piezos.

last updated:Mar 17, 2026

PI Japan
PI Japan
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Products compatible with vacuum environments, from hexapods to stages and piezos.

Do you have any of these concerns in a vacuum environment? - Positioning accuracy is unstable in a vacuum environment - Worried about wear and gas release effects - Want to configure within limited installation space Due to these challenges, standard products cannot fully demonstrate their performance in a vacuum environment. PI's vacuum-compatible products achieve high precision, low outgassing, and UHV compatibility, with numerous achievements in semiconductor, analytical equipment, and research applications. We have a list of vacuum-compatible products available on our website. For more details, please download and check the catalog below. Additionally, you can view products not listed in this catalog on the product page of our official website. Please be sure to check them out as well.

    Other machine elements
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Positioning challenges in a vacuum environment. List of PI's vacuum-compatible products.

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basic information

For details, please refer to the catalog or visit the product page on the official website. We also welcome inquiries regarding product selection, so feel free to contact us. *The product catalog featured in the related catalog introduces some of the vacuum-compatible products. You can check the product list from the product page on the official website at the top of the page.

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Applications/Examples of results

High vacuum (HV) or ultra-high vacuum (UHV).

catalog(14)

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25mm movement high-precision compact motor stage with a size of 60mm

25mm movement high-precision compact motor stage with a size of 60mm

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Small Linear Stage 'L-505'

Small Linear Stage 'L-505'

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High-precision Z stage 'L-310'

High-precision Z stage 'L-310'

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P-840/P-841 Preloaded Piezo Actuator

P-840/P-841 Preloaded Piezo Actuator

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P-733.2/3 XY(Z) Piezo Nanopositioning Stage

P-733.2/3 XY(Z) Piezo Nanopositioning Stage

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P-216 PICA High-Power Piezo Stack Actuator

P-216 PICA High-Power Piezo Stack Actuator

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[P-844 - P-845 with preload] Piezo actuator

[P-844 - P-845 with preload] Piezo actuator

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P-753 LISA Linear Actuator and Stage

P-753 LISA Linear Actuator and Stage

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3-axis high-precision positioning piezo stage P-561 to P-563

3-axis high-precision positioning piezo stage P-561 to P-563

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P-518~P-528 Z-chip tilt opening piezo stage

P-518~P-528 Z-chip tilt opening piezo stage

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P-235 PICA High-Power Piezo Stack Actuator

P-235 PICA High-Power Piezo Stack Actuator

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PIHera Small XY Axis Piezo Stage P-620.2~P-629.2

PIHera Small XY Axis Piezo Stage P-620.2~P-629.2

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P-620.1~P-629.1 PIHera Small X-axis Piezo Stage

P-620.1~P-629.1 PIHera Small X-axis Piezo Stage

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2 Electrode Capacitive Sensor D-050/D-100

2 Electrode Capacitive Sensor D-050/D-100

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Company information

PI

PI Japan

Electronic Components and Semiconductors

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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.

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