Ultra-high purity gas pressure regulator "S-TORRVT50 Series"
Conducting shipment inspections on all units! Introduction of the Tide diaphragm-type ultra-high purity gas pressure regulator.
The "S-TORRVT50 series" is a pressure regulator designed for ultra-high purity gases, featuring a structure that is robust for the supply of liquefied gases, utilizing a tide diaphragm system. By eliminating the threaded structure in the gas contact area and applying electrolytic polishing as standard, it achieves very high moisture replacement characteristics and particle reduction. The removal of springs from the gas contact area reduces the risk of particle generation. By providing heated supply, it can accommodate gases with a vapor pressure of 1.0 MPa or higher, with a maximum operating pressure of 2.5 MPa. 【Features】 ■ Tide diaphragm type for liquefied gases ■ Developed based on the TORR regulator ■ Incorporates a filter in the flow path of the primary chamber to reduce internal leak occurrences ■ Conducts a complete inspection, including He leak tests, for all units shipped *For more details, please refer to the PDF document or feel free to contact us.
- Company:日酸TANAKA 産業機器事業部
- Price:Other