Centris pump for precise pulse supply in semiconductor ALD and CVD.
For the supply of liquid precursors for ALD/CVD! It allows for liquid volume adjustment in 0.3 nl increments and flow rate adjustment in 17 nl/min increments. Ideal for pumping that requires strict optimization.
A high-precision pump supplied by the world's top manufacturer, Tecan, in the embedded syringe pump market. Many devices have been introduced domestically. It is widely used for liquid delivery purposes that require non-pulsating, accurate, and highly reproducible performance. Centris Liquid delivery volume range per operation: 0.3nl to 12.5ml (*) Volume adjustment unit: minimum 0.3nl Flow rate range: 17μl/min to 750ml/min (0.3nl/s to 12.5ml/s) Flow rate adjustment unit: 17nl/min (0.3nl/s) * Depends on the syringe capacity installed (50ul to 12.5ml) Example: When a 5ml syringe is installed Volume adjustment unit: minimum 104nl Flow rate range: 1.62μl/min to 300ml/min (0.3nl/s to 5ml/s) Flow rate adjustment unit: 1.62μl/min (28nl/s) This pump has a resolution of 181,490 steps relative to the installed syringe, enabling highly precise liquid handling. Additionally, it can be equipped with liquid path switching valves ranging from 3 ports to 12 ports, allowing for the suction of solutions from multiple liquid sources. A mechanism is incorporated to continuously monitor the delivery volume and flow rate, automatically notifying of any abnormalities with error codes.
- Company：テカンジャパン
- Price：100,000 yen-500,000 yen
