Improvement of the Liquid Delivery System (LDS) with Centris Pump.
Improvement of precursor liquid supply accuracy for ALD/CVD: Liquid volume adjustment in 0.3 nl increments and flow rate adjustment in 17 nl/min increments are possible. Ideal for optimized liquid delivery.
High-precision pumps supplied by the world's top manufacturer, Tecan, in the embedded syringe pump market. Many devices have been introduced domestically as well. They are widely used for liquid delivery purposes due to their non-pulsating, accurate, and highly reproducible performance. Centris Liquid delivery volume range per operation: 0.3nl to 12.5ml (*) Volume adjustment unit: minimum 0.3nl Adjustable flow rate range: 17μl/min to 750ml/min (0.3nl/sec to 12.5ml/sec) Flow rate adjustment unit: 17nl/min (0.3nl/sec) * Depends on the syringe capacity installed (50ul to 12.5ml) Example: When a 5ml syringe is installed Volume adjustment unit: minimum 104nl Adjustable flow rate range: 1.62μl/min to 300ml/min (0.3nl/sec to 5ml/sec) Flow rate adjustment unit: 1.62μl/min (28nl/sec) With a resolution of 181,490 steps for the installed syringe, it enables highly precise liquid handling. Additionally, it can be equipped with liquid path switching valves ranging from 3 ports to 12 ports, allowing for the suction of solutions from multiple liquid sources. A mechanism that constantly monitors the delivery volume and flow rate automatically alerts users to abnormalities with error codes.
- Company：テカンジャパン
- Price：100,000 yen-500,000 yen
