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Vacuum Pump(ULVAC) - List of Manufacturers, Suppliers, Companies and Products

Vacuum Pump Product List

16~30 item / All 30 items

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G-TRAN Series Pirani Gauge

Pirani vacuum gauge capable of measuring from 3000 Pa to 0.4 Pa [ULVAC].

The sensor unit SP1 is a Pirani vacuum gauge that can measure from 3000 Pa to 0.4 Pa, featuring an integrated measuring element WP series and circuit section. This vacuum gauge eliminates the operation and display section from conventional controllers, focusing on the minimum necessary functions, which enables "cost reduction" and "space saving." 【Specifications】 ○ LED display: Power, Error, Set Point 1/2 ○ Power supply voltage: DC 24V ± 2V, 90mA (Max.) ○ Input/output connector: D-sub-15P (M2.6 screw) ○ Body weight: 190g (excluding measuring element) ○ Accessories: 1 set of input/output connectors, 1 instruction manual For more details, please contact us or download the catalog.

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Dry Pump Energy-Saving Attachment ECO-SHOCK ES4A

No decrease in exhaust speed! Significant reduction in power consumption of dry pumps is possible. [ULVAC]

ECO-SHOCK is an attachment that significantly reduces power consumption by being installed on dry pumps. The ES4A is ideal for applications that require frequent evacuation of the loading and unloading chamber, as well as for reducing the power consumption of dry pumps with long operating times at the target pressure, such as turbo molecular pump packs. It also helps to suppress heat generation in dry pumps, thereby reducing the power consumption of air conditioning equipment. 【Features】 - Contributes to energy saving in dry pumps - Effective with volumetric transfer type dry pumps - No decrease in pumping speed across all pressure ranges - Easy to install - Reduces heat generation and power consumption of air conditioning equipment For more details, please contact us or download the catalog.

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Oil Rotary Vacuum Pump VD Series

This is an oil rotary vacuum pump developed as a "low noise type pump." [ULVAC]

The VD series is a motor-directly coupled oil rotary vacuum pump developed as a "low-noise type pump." It can be used for a wide range of exhaust applications, from deposition and sputtering equipment to vacuum packaging machines, serving as the core pump for creating vacuum. There is a strong demand for "quietness" in vacuum pumps to improve the working environment. The VD series is a low-noise motor-directly coupled oil rotary vacuum pump developed in response to such requests. Additionally, it is designed with maintenance in mind, making routine maintenance and inspections very easy. It can be used in a wide range of applications, from laboratories that require quietness to various production lines. 【Features】 ○ Low noise ○ Excellent maintainability ○ Stable exhaust even at high pressures near atmospheric pressure For more details, please contact us or download the catalog.

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Oil Rotary Vacuum Pump VS Series

This is a motor-directly connected oil rotary vacuum pump that achieves compact size, lightweight, and low vibration. [ULVAC]

The VS series is a motor-direct oil rotary vacuum pump that achieves simplification and high speed through the adoption of a single-stage vane type (rotor type), resulting in a compact, lightweight, and low-vibration design. By significantly reducing vibrations, it alleviates the burden associated with pump installation, such as foundation work in factory buildings. Additionally, the enhancement of the oil circulation and cooling systems ensures stable exhaust performance at high intake pressures, making it suitable for a wide range of applications, including processes with frequent exhaust cycles. 【Features】 ○ Low vibration and low noise ○ Lightweight and compact ○ Excellent maintainability For more details, please contact us or download the catalog.

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Crystal Oscillator Film Deposition Controller CRTM-9100G

Quartz oscillator film deposition controller with low-rate deposition control and high-precision film thickness control [ULVAC].

The CRTM-9100G is a quartz crystal oscillator-based film deposition controller developed with the concept of balancing low cost and high functionality. It incorporates all the technologies that Ulvac has cultivated over many years as a manufacturer of quartz crystal oscillator-based film deposition controllers, including continuous deposition of multilayer films, simultaneous deposition control of up to four components, and low rate control. It can be utilized for a long time in various deposition processes. 【Specifications】 ○Dimensions: W×D×H 480mm×350mm×149mm ○Weight: Approximately 8kg ○Utility: AC 85 – 230V 50/60Hz ○Power Consumption: 60W Max ○Operating Environment: Temperature: 5 – 40℃, Humidity: 5 – 95% RH (without condensation) For more details, please contact us or download the catalog.

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  • Coating thickness gauge

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Oil rotary vacuum pump VS650A/VS750A

It is possible to reduce the burden associated with the installation of pumps for foundation work and other related tasks. 【ULVAC】

The VS650A/VS750A is a single-stage vane type (rotary wing type) oil rotary vacuum pump. It offers a large exhaust capacity and stable exhaust performance, and its low vibration helps reduce the burden associated with pump installation for foundation work. Additionally, you can choose between air cooling and water cooling, so please select according to your installation environment. 【Product Lineup】 ○VS650A-A ○VS650A-W ○VS750A-A ○VS750A-W For more details, please contact us or download the catalog.

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Crystal Oscillator Film Deposition Controller CRTM-6000G

From single-layer films to multi-layer films, it can be used for a wide range of deposition control. 【ULVAC】

The CRTM-6000G is a quartz oscillator-based film deposition controller that excels in cost performance while enhancing the fundamental capabilities required of a film deposition controller. Despite its compact half-rack size, it is capable of low-rate control and continuous deposition control for multilayer films up to 99 layers. 【Specifications】 ○ Dimensions: W×D×H 240mm×350mm×99mm ○ Weight: Approximately 3.6kg ○ Utility: AC85 ~ 230V 50/60Hz ○ Power Consumption: 30W Max ○ Operating Environment: Temperature: 5 ~ 40℃, Humidity: 5 ~ 95% RH (without condensation) For more details, please contact us or download the catalog.

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G-TRAN Series 4 Channel Display Unit IM1R1

Up to 4 measurement units can be connected, allowing simultaneous measurement and display. 【ULVAC】

The 4-channel display unit can connect up to 4 measurement units, allowing simultaneous measurement and display. It comes standard with 8-point setpoint output and I/O communication control functions. With the linkage function between the atmospheric pressure Pirani gauge or the Pirani gauge and the ion gauge, it enables easy measurement of a wide range of pressures. 【Features】 ○ Adopts 96mm DIN size ○ Input voltage can be selected from DC24V or AC100V ○ Capable of connecting up to 4 measurement units ○ Simultaneous measurement and output for each sensor (CH1-4) ○ Linked measurement possible between IG (CH1) and PG (CH2) For more details, please contact us or download the catalog.

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Dry Vacuum Pump LR/HR/UR Series

Achieved high durability in hard processes such as CVD and dry etching. [ULVAC]

The LR/HR/UR series has achieved high durability in hard processes such as CVD and dry etching through the effective utilization of compression heat, thanks to its unique high-temperature uniform heating technology. In light processes, it is possible to reduce power consumption by up to approximately 70% in combination with ECO-SHOCK. Additionally, it improves maintainability and reduces noise, and all models are CE compliant (optional). 【Product Lineup】 ○ LR/HR60 ○ LR/HR90 ○ LR180 ○ LR421 ○ LR421-T, etc. For more details, please contact us or download the catalog.

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Abnormal Discharge Prevention Unit A2K Series

High throughput! Large capacity is possible with master-slave connections. [ULVAC]

The A2K series is an abnormal discharge prevention unit that applies a positive voltage pulse to a DC power supply in a reactive sputtering process to neutralize the charge on the target. By reducing abnormal discharges, it enables high power input. The A2K-20K and 40K can be operated in parallel with up to six units each. It is possible to synchronize the output pulses of multiple A2K units. It can be easily installed on existing equipment, achieving improved yield and throughput at a low cost. 【Features】 ○ High throughput ○ Reduced substrate damage ○ Suppressed substrate temperature ○ Simple connectivity ○ Adjustable reverse pulse frequency For more details, please contact us or download the catalog.

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Turbo Molecular Pump Exhaust Unit YTP Series

This is an exhaust unit capable of evacuating from atmospheric pressure to high vacuum. [ULVAC]

The YTP series is an exhaust unit capable of evacuating from atmospheric pressure to high vacuum, using the turbo molecular pump UTM series, which employs "pivot bearings + magnetic bearings (permanent magnets)." It is available in two types: the SA type, which can be automatically evacuated with a START/STOP switch, and the manual operation M type. 【Features】 ○ Two types available: automatic operation type (YTP-SA series) and manual operation type (YTP-M series), with four selectable exhaust speeds ○ In the event of a power outage, the fore valve automatically closes and the rotary pump is automatically vented → Even after power is restored, the exhaust unit will not operate ○ The saturation vapor pressure of the fluorinated oil used in the turbo molecular pump is around 10^-11 Pa (at 20°C), making it virtually oil-free ○ The turbo molecular pump uses high-performance bearings, eliminating the need for troublesome oil changes or bearing replacements For more details, please contact us or download the catalog.

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Ultra-high vacuum introduction device, zero-length viewport

This is a variety of introduction devices compatible with ultra-high vacuum using UFC flanges. 【ULVAC】

This is a variety of feedthroughs compatible with ultra-high vacuum using UFC flanges (bakeable flanges with knife-edge type metal seal). The CMS series is for current and voltage, the TDU series is for rotational motion, and the TSU series is for linear motion, all designed to introduce these elements into an ultra-high vacuum chamber without leakage from the atmosphere. The TVU series is a viewport for observing the interior of the ultra-high vacuum chamber from the atmosphere with a wide field of view. 【Product Lineup】 ○ Current feedthrough terminal: CMS series ○ Ultra-high vacuum rotary feedthrough terminal: TDU series ○ Ultra-high vacuum linear feedthrough terminal: TSU series ○ Ultra-high vacuum zero-length viewport: TVU series For more details, please contact us or download the catalog.

  • Vacuum Equipment

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Cryosystem

Intelligent. Smart. Economical.

A cryo system combining high-performance components. By easily combining them, it can meet the requirements of various applications. The cooling system consists of the following products: - COOLPAK i: Compressor unit - COOLPOWER i: Ultra-low temperature refrigeration unit The cryopump system consists of the following products: - COOLPAK i: Compressor unit - COOLVAC i: Cryopump Rivolt's systems are generally compliant and certified with all standards and regulations (RoHS, EU compliance, safety), particularly IEC/EN 61010 and UL 61010. They can be used in a wide range of applications across various industries: - Low temperature cooling systems - Research and development - New technologies - Industrial coating and processing

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Dry Vacuum Pump ECO-SHOCK

This is a groundbreaking attachment that significantly reduces power consumption. 【ULVAC】

ECO-SHOCK is a revolutionary attachment that can significantly reduce the power consumption of your currently used dry pump by installing it on the dry pump. It is ideal for dry pumps used in inert gas exhaust applications. 【Features】 - Can reduce the power consumption of dry vacuum pumps by up to 80% - No decrease in exhaust speed across all pressure ranges - Easy to install For more details, please contact us or download the catalog.

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