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Vacuum Pump(ULVAC) - List of Manufacturers, Suppliers, Companies and Products

Vacuum Pump Product List

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Dry Pump Energy-Saving Attachment ECO-SHOCK

Dry Pump Energy-Saving Attachment ECO-SHOCK

This is an attachment that significantly reduces the power consumption of your existing dry pump. *Please inquire about its usability. [ULVAC]

■ It is possible to significantly reduce the power consumption of dry pumps. This is particularly effective for multi-stage roots pumps. For other types of pumps, please inquire. ■ There is no decrease in exhaust speed across the entire pressure range. ■ Installation is easy.

  • Vacuum pump

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Dry Vacuum Pump CR Series

Dry Vacuum Pump CR Series

The exhaust chamber can achieve stable exhaust over a long period without using oil and without contact. 【ULVAC】

The CR series dry vacuum pumps are air-cooled, roots-type dry vacuum pumps. They do not use oil in the exhaust chamber, and the rotor and cylinder operate without contact, allowing for stable operation over long periods. No cooling water or nitrogen gas is required, contributing to reduced running costs. 【Product Lineup】 ○ CR16A ○ CR30A ○ CR60A ○ CR300A For more details, please contact us or download the catalog.

  • Vacuum pump

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Gas Analyzer Software Qulee QCS

Gas Analyzer Software Qulee QCS

Software compatible with ULVAC's residual gas analyzers/process gas monitors.

"Qulee QCS" is software compatible with ULVAC's residual gas analyzers/process gas monitors. This software is compatible with most gas analyzers manufactured by ULVAC, allowing anyone to perform measurements and save data with simple click operations. 【Features】 ○ Standard software for Qulee → Standardly adopted across the entire Qulee series (compatible with Windows XP/7) ○ Easy operation → Simple operation with a comprehensive set of shortcut buttons ○ Rich measurement modes → Includes scan mode, trend mode, analog mode, sensitivity calibration mode, etc. ○ Enhanced leak test functionality → Easy leak checks possible with helium leak test mode ○ Gas composition name display available → Gas composition names can be displayed in scan mode For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments

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Oil rotary vacuum pump PKS series

Oil rotary vacuum pump PKS series

It is a very robust large oil rotary vacuum pump with stable exhaust characteristics. [ULVAC]

The PKS series is a very robust large oil rotary vacuum pump with stable exhaust characteristics. It can be used in a wide range of applications, including the metal and automotive industries, as well as the chemical, pharmaceutical, and food industries. Disassembly and assembly are extremely easy, and inspecting the exhaust valve is also straightforward. 【Product Lineup】 ○PKS-016 ○PKS-030 ○PKS-070 For more details, please contact us or download the catalog.

  • Vacuum pump

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Oil Rotary Vacuum Pump VD Series Ver.C

Oil Rotary Vacuum Pump VD Series Ver.C

Adopted forced oil supply method! This is a vacuum pump that can be used for a wide range of applications. [ULVAC]

The VD Series Ver.C is an oil-sealed rotary vacuum pump equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor. It features a two-stage vane design that achieves excellent ultimate pressure and has been optimized for low noise, making it suitable for a wide range of applications. One motor can accommodate a wide voltage range from 200-240V to 380-460V. The pump maintains stable exhaust speed even near atmospheric pressure, making it ideal for repeated continuous operation between atmospheric and vacuum conditions. 【Features】 ○ Equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor ○ One motor can accommodate a wide voltage range ○ Utilizes a forced lubrication system ○ Stable exhaust speed even near atmospheric pressure ○ Options available for special applications → In addition to the standard model, three variants (A specification, B specification, H specification) are available for special applications. For more details, please contact us or download the catalog.

  • Vacuum pump

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Oil Rotary Vacuum Pump PVD Series

Oil Rotary Vacuum Pump PVD Series

It is a vacuum pump with excellent ultimate pressure, suitable for a wide range of applications. 【ULVAC】

The PVD series is a compact oil rotary vacuum pump that has been a mainstay for many years, widely used by customers due to its reliability and ease of use. It is a two-stage rotary vane pump that excels in achieving low pressure, making it suitable for a wide range of applications. 【Features】 ○ Belt-driven compact oil rotary vacuum pump (rotary pump) ○ Excellent exhaust characteristics For more details, please contact us or download the catalog.

  • Vacuum pump

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YMV Series Base Unit for Mechanical Booster Pumps

YMV Series Base Unit for Mechanical Booster Pumps

Base unit for combining a mechanical booster pump and an oil rotary vacuum pump [ULVAC].

The YMV series is a frame unit designed to combine mechanical booster pumps and oil-sealed rotary vacuum pumps. Four types of frame units are available to match the pump displacement. The independent frame design emphasizes pump maintainability, making it ideal for use in production facilities. 【Lineup】 ○YMV-01A ○YMV-03A ○YMV-06A For more details, please contact us or download the catalog.

  • Vacuum pump

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Dry Vacuum Pump GR Series

Dry Vacuum Pump GR Series

This is a pump with a simple structure designed for general industrial use. 【ULVAC】

The GR Series dry vacuum pumps are designed with a simple structure for general industry, based on the proven and reliable LR and HR series. They can be used for high-load applications such as repeated exhaust from atmospheric pressure to vacuum and continuous operation in high-pressure areas. They are ideal for exhausting load lock chambers that require high throughput. 【Product Lineup】 ○ GR60A ○ GR90A ○ GR180A For more details, please contact us or download the catalog.

  • Vacuum pump

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Dry Vacuum Pump ECO-SHOCK

Dry Vacuum Pump ECO-SHOCK

This is a groundbreaking attachment that significantly reduces power consumption. 【ULVAC】

ECO-SHOCK is a revolutionary attachment that can significantly reduce the power consumption of your currently used dry pump by installing it on the dry pump. It is ideal for dry pumps used in inert gas exhaust applications. 【Features】 - Can reduce the power consumption of dry vacuum pumps by up to 80% - No decrease in exhaust speed across all pressure ranges - Easy to install For more details, please contact us or download the catalog.

  • Vacuum pump

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Optical Process Monitor Optius

Optical Process Monitor Optius

You can monitor the status of various plasma processes in real time. 【ULVAC】

The optical process monitor Optius can monitor the status of various plasma processes in real-time by measuring the emission spectrum of the plasma. It is ideal for MFC control in reactive sputtering and endpoint detection in etching. 【Specifications】 ○ Weight: Main unit (TSC): 4.9kg Expansion unit (ESC, 1ch): 1.3kg ○ Power supply: AC100–240V (50/60Hz) ○ Power consumption: 100W (when using 5 channels) ○ Operating environment: Temperature: 10 – 40°C, Humidity: 15 – 80% RH (without condensation) For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments
  • Other process controls

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Optical EB Gun EGP-1G

Optical EB Gun EGP-1G

This is an electron beam evaporation source for optical film deposition that reduces costs. [ULVAC]

The EGP-1G is an electron beam evaporation source for optical film deposition that keeps costs down by adopting a simple 180° beam deflection method. Furthermore, by employing a two-sided positioning structure, it has a model with high beam position reproducibility after maintenance. 【Specifications】 ○ Electron beam deflection angle: 180° ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H) excluding protrusions: 185mm×239mm×179mm ○ Weight: 11kg ○ Maximum output: 10kW For more details, please contact us or download the catalog.

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HPS-N Series EB Power Supply for Film Formation

HPS-N Series EB Power Supply for Film Formation

This is a power supply compatible with electron beam evaporation sources, aimed at stabilizing the circuit and improving performance. [ULVAC]

The HPS-N series is a power supply compatible with electron beam evaporation sources, designed to stabilize circuits and improve performance based on Ulvac's many years of accumulated technology and achievements. By using it in combination with the EB Gun Controller EGC-10GS, it can support both EB guns for optical thin films and EB guns for metallic thin films. 【Product Lineup】 ○HPS-600N ○HPS-1000N ○EGC-10GS For more details, please contact us or download the catalog.

  • power supply

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EB Gun for Metal Vapor Deposition EGN Series

EB Gun for Metal Vapor Deposition EGN Series

This is an electron beam evaporation source developed with a focus on improving maintainability for metal deposition. 【ULVAC】

The EGN series is a metal vapor deposition electron beam evaporation source developed with a focus on improving maintenance. The adoption of a flat-top structure and a 15mm hearth deck reduces the coating area on the electron beam evaporation source, achieving high maintenance efficiency. 【Specifications】 ○ Electron beam deflection angle: 270° ○ Number of crucibles: 6 ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H): 260mm×340mm×144mm ○ Weight: 28kg For more details, please contact us or download the catalog.

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G-TRAN Series Multi-Ion Gauge SH2-1/SH2-2

G-TRAN Series Multi-Ion Gauge SH2-1/SH2-2

While enabling wideband measurements, we have significantly reduced running costs. 【ULVAC】

ULVAC has developed and commercialized the transducer-type "G-TRAN Series Multi-Ion Gauge" (patent pending), which allows for the connection of measuring elements with different measurement ranges. In conventional multi-principle vacuum gauges, we often hear customer feedback such as "a failure of one measuring element requires the complete replacement of all measuring elements," "the measuring elements are complex and prone to failure," and "the measuring elements are expensive." With this new approach, we can enable wide-range measurements while significantly reducing running costs and addressing low environmental impact. 【Product Lineup】 ○SH2-1 Standard Specification ○SH2-2 Serial Communication Specification For more details, please contact us or download the catalog.

  • Pressure

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Vacuum Gauge G-TRAN Series Multi-Ion Gauge ST2-1/2-2

Vacuum Gauge G-TRAN Series Multi-Ion Gauge ST2-1/2-2

Improved measurement accuracy! Equipped with an LED that allows for easy confirmation of the vacuum gauge's status at a glance. [ULVAC]

The G-TRAN series vacuum gauge multi-ion gauge ST2-1/ST2-2 achieves long life by maximizing the advantages of the triode type, even in harsh environments for vacuum gauges. ULVAC has developed and commercialized an ion vacuum gauge that can measure accurately for a longer time, even in severe conditions. The triode type metal ion vacuum gauge significantly reduces running costs and can also contribute to improving the yield of various processes. 【Features】 ○ Triode type metal ion vacuum gauge (patent pending) ○ Small, metal measuring element ○ Wideband measurement ○ Measuring elements with different measurement ranges can be connected ○ Accurate atmospheric pressure measurement For more details, please contact us or download the catalog.

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