Last Updated： Aggregation Period:Apr 15, 2026～May 12, 2026
This ranking is based on the number of page views on our site.
Last Updated： Aggregation Period:Apr 15, 2026～May 12, 2026
This ranking is based on the number of page views on our site.
Last Updated： Aggregation Period:Apr 15, 2026～May 12, 2026
This ranking is based on the number of page views on our site.
601～630 item / All 983 items
Due to excellent suction speed, the measurement chamber is evacuated quickly, providing stable vacuum in the transfer area to a high-flow turbo molecular pump at high vacuum.
Basic flow rate: 4.2 - 4.8 l/min ~ Achievable vacuum degree: 4.2 - 5.0 mbar abs ~ Maximum allowable discharge pressure: 0.1 - 0.3 bar (0.01 - 0.03 MPa)
It can be used in harsh driving conditions and is durable for versatile vacuum applications.
- Process pump - Corrosion-resistant specification Basic flow rate: 33 l/min to 39 l/min (varies depending on diaphragm material) Achievable vacuum level: < 100 mbar abs Pump head material: Aluminum / Stainless steel Diaphragm material: CR / FPM (FKM) / PTFE-coated Available for Japanese voltage AC single-phase 100V 50/60Hz.
It can be used in harsh driving conditions and is durable for multi-purpose vacuum applications.
- Process pump - Corrosion-resistant specification Basic flow rate: 18 l/min to 22 l/min (varies depending on diaphragm material) Achievable vacuum level: < 20 mbar abs Pump head material: Aluminum / Stainless steel Diaphragm material: CR / FPM (FKM) / PTFE-coated Available for Japanese voltage AC single phase 100V 50/60Hz.
Achieves high pump performance despite its compact size.
Main Features - Long lifespan - Compact size with high air pressure performance - Quiet and low vibration operation - Configurable pump setup - Boost function - Expanded flow adjustment range - Analog and digital speed control - Enhanced safety features - New warning and failure management system Typical Application Areas - Fuel cells – Hydrogen recirculation - Measurement technology – Transfer pumps for environmental analysis - Equipment analysis (including sample pretreatment) - Diagnostic technology – Extraction of sample residues - Vacuum technology – Pick and place applications - Medical technology – Surgical suction devices, diagnostics, histology, and cardiology applications - Laser technology – Exhaust for laser chambers
Achieves high pump performance despite its compact size.
Main Features - Long lifespan - Compact size with high air pressure performance - Quiet and low vibration operation - Configurable pump setup - Boost function - Expanded flow adjustment range - Analog and digital speed control - Enhanced safety features - New warning and failure management system Typical Application Areas - Fuel cells – Hydrogen recirculation - Measurement technology – Transfer pumps for environmental analysis - Equipment analysis (including sample pretreatment) - Diagnostic technology – Extraction of sample residues - Vacuum technology – Pick and place applications - Medical technology – Surgical suction devices, diagnostics, histology, and cardiology applications - Laser technology – Exhaust for laser chambers
Achieves high pump performance despite its compact size.
Main Features - Closed-loop vacuum control - Configurable pump interface and performance - Contamination-free flow - Customizable - Maintenance-free - Operates regardless of installation position - Long lifespan - High air pressure performance - Compact size / high power density - High dew condensation resistance Typical Application Areas - Medical - Analytical instruments - Gas sampling - Inkjet printers - Degassing - Safety/Security
Thermal process monitor suitable for sterilizer validation!
"E-Val Pro" is a thermoprocess monitor suitable for sterilizer validation. It has a built-in memory, allowing it to be used as a standalone device. It can measure up to 40 points per unit, making it useful for sterilizer validation in pharmaceutical companies. 【Features】 ■ Expandable up to 40 channels ■ Equipped with a full-color touch display ■ Includes an 8-hour battery ■ User password setting available for complete security ■ Thermocouple sensor with serial number *For more details, please refer to the PDF document or feel free to contact us.
No oil used in the gas connection part! It is a dry-type pump that does not require lubrication.
The "MP-3NP-C" is a piston-type compressor that uses a brushless motor with DC24V/DC12V and has a built-in dedicated driver. It is compact and lightweight, designed to operate with very low noise levels. 【Operating Environment】 ■ Temperature: 0 to 40℃ ■ Humidity: below 85% ■ No condensation ■ Indoor use *For more details, please download the PDF or feel free to contact us.
Maintenance-free vacuum pump and blower with a dry type that does not require oiling.
The "M-66V" is a rotary type vacuum pump/blower that can be used for vacuum applications and blowers, designed for low pulsation air. Available in single-phase 100V, 200V, and three-phase 200V. Since it is a direct motor connection type, it takes up little space, requires no belt replacement, and is easy to maintain. 【Features】 ■ Usable for vacuum and blower applications ■ Space-saving and easy maintenance ■ Oil-free dry type ■ Built-in thermal protector (for single-phase 100V and 200V only) ■ Power connection is only through the motor lead wires *For more details, please download the PDF or feel free to contact us.
Available for use in vacuum and blower applications as air with low pulsation!
The "M-100VHR" is a belt-type rotary vacuum pump and blower that performs sufficiently even at low rotational speeds. It is a dry type that does not require lubrication, making it maintenance-free for use. 【Features】 ■ Sufficient performance even at low rotational speeds ■ Long lifespan ■ Low noise ■ Available in single-phase 100V and three-phase 200V ■ Power connection is only via the motor lead wires *For more details, please download the PDF or feel free to contact us.
Vacuum level adjustment is possible on the pump side! A vacuum pump that can be adjusted while checking the included vacuum gauge.
The "Rotary Vacuum Pump MSV-200-3GV" is a vacuum pump model equipped with a vacuum gauge and a vacuum adjustment valve. This product is set for a continuous vacuum level and can be adjusted below that level. Additionally, due to its rotary design, it can be used for vacuum applications and as a blower with minimal pulsation. Furthermore, as it is an oil-free dry type, there is no need for oiling, making it maintenance-free. 【Features】 ■ Standard equipped with a vacuum gauge and vacuum adjustment valve ■ Vacuum level adjustment can be done with the pump ■ Directly connected motor type, saving space and easy maintenance ■ No need for oiling *For more details, please refer to the catalog or feel free to contact us.
Economic pump! Widely used!
This product is an oil-sealed, rotary vacuum pump designed for use with a mechanical booster pump. The oil-sealed rotary pump compresses gas that varies in pressure from atmospheric pressure to 0.13 to 1.3×10^-2 Pa, and then releases it into the atmosphere. Directly sealed by oil, the rotary vacuum pump offers both compactness and dust-free operation. 【Features】 ■ Usable in conjunction with a mechanical booster pump ■ Compresses gas *For more details, please refer to the catalog or feel free to contact us.
The standard of direct connection pumps backed by a wealth of proven results.
There are seven models available with exhaust speeds ranging from 50 to 1300 (60 to 1500) L/min, allowing customers to select the most suitable equipment for their applications and environments. (60Hz)
Rich track record, high reliability and durability, diverse variations.
It is possible to select the most suitable equipment for the customer's application and environment.
High durability Kinney-type vacuum pump
The KS series is a Kinney-type oscillating piston oil rotary vacuum pump with a belt drive system. It is particularly suitable for large vacuum pumps, and we have developed nine models in the series ranging from 700 to 15,000 L/min. At the same time, due to its robust structure, it has gained a reputation for being a highly durable pump and is widely used as the main pump for various vacuum furnaces that require durability.
Protecting the vacuum pump with outstanding filtering capability.
This is an oil filtration system (oil-water separation device) that prevents oil deterioration inside vacuum pumps due to moisture. There are a total of four models in the Labmaster LM series and Hyperclean WS series, allowing for the selection of the most suitable equipment for your applications and environment.
Outstanding corrosion resistance and ease of handling.
The use of Teflon-based components in the vacuum chamber demonstrates excellent corrosion resistance against the suction of organic solvent gases and corrosive gases.
Measurement range: Cold cathode ion gauge from 5.0×10‒1 to 1×10‒6 Pa
Equipped with a discharge monitoring function that ensures reliable discharge in a high vacuum area without filament breakage. It is easy to operate with key controls, displays pressure status in digital and bar graph formats, and includes a reassuring feature that allows you to check the operating status through various messages during discharge stoppage and other situations.
A customized vacuum drying and baking device manufactured according to your specifications. You can choose the optimal device that meets your needs!
Sato Vacuum's vacuum dryers, vacuum drying devices, and vacuum baking devices offer a diverse lineup of series, each with unique features such as chamber size, vacuum level, heating temperature, and operating method. We specialize in customized vacuum equipment tailored to your specifications, bringing your requests to life as vacuum devices.
We respond to experimental requests from customers (such as vacuum drying and vacuum baking processes).
At Sato Vacuum Company, we have newly introduced experimental equipment that enables processing under high vacuum (×10^4Pa) and high temperature (Max 500℃), in addition to our conventional equipment, and it is permanently available for customer work sample testing.
This is a vacuum drying device that meets the demands of various research and development needs with a pressure of 10^1 Pa.
The exterior features a beautiful hairline finish made of all stainless steel, and it can be connected to a vacuum pump tailored to the installation location. It is a vacuum drying device that effectively utilizes space, such as on a laboratory bench.
Solve the issues with dry vacuum pumps! High-capacity jacket-type Roots vacuum pump. No waste liquid disposal costs!
【Features】 - Supports solidification and polymerization inside the pump - Addresses scale adhesion in the jacket section - No waste liquid treatment costs as it does not use sealing liquid - Ideal for environmental measures such as ISO14001 and PRTR - Compact design with direct cooling method, eliminating the need for multiple coolers - Supports cleaning inside the casing - Optimal for CO, PSA, and solvent recovery
Reliable VP-type vacuum pumps that continue to meet the diverse needs of the industry.
The VP-type vacuum pump is a multi-stage roots dry vacuum pump that employs a cooling technology unmatched by other companies. The YKS direct inlet-target cooling method, which achieves tight operation in a roots configuration and enables high vacuum pumping, is a new cooling technology developed based on unique technology. In a roots vacuum pump, the rotors and the casing rotate without contact while maintaining a slight clearance. This results in the significant feature of being a "dry, oil-free type." However, the slight clearance necessary for non-contact rotation can decrease due to thermal expansion caused by gas compression heat, leading to eventual contact unless the rotors can remove the compression heat. Our developed direct inlet-target cooling method adopts a structure that directly cools the interior of the rotor with a coolant, thereby maintaining a constant clearance and stable vacuum level while providing numerous excellent features. In traditional cooling methods, the production of stainless steel vacuum pumps was impossible due to the large thermal expansion rate. By leveraging the excellent features of the direct cooling method, we have successfully developed a stainless steel vacuum pump that offers outstanding performance for the suction of corrosive gases.
Our Roots-type vacuum pump is a multi-stage Roots vacuum pump that utilizes unique cooling technology.
Exhaust can achieve a clean vacuum without containing sealing water or sealing oil, similar to a sealed liquid vacuum pump. It operates across the entire range from atmospheric pressure to the inlet shut-off using a Roots type, pursuing ease of use.
Our Roots-type vacuum pump is a multi-stage Roots vacuum pump that utilizes unique cooling technology.
Exhaust can achieve a clean vacuum without containing sealing water or sealing oil, similar to a sealed liquid vacuum pump. It operates over the entire range from atmospheric pressure to the inlet shut-off using a Roots type, focusing on ease of use.
Our Roots-type vacuum pump is a multi-stage Roots vacuum pump that utilizes unique cooling technology.
Exhaust can achieve a clean vacuum without containing sealing water or sealing oil, similar to a sealed liquid vacuum pump. It operates throughout the entire range from atmospheric pressure to the inlet shut-off using a Roots type, focusing on ease of use.
The fluororesin lining construction for the gas connection section is optimal for the inhalation of halogen-based gases and strongly acidic gases.
The Roots-type dry vacuum pump VP series features a fluororesin lining in the gas contact area. The thickness of the fluororesin lining is over 150μm, providing durability against halogen gases and strong acidic gases. It can be utilized in applications such as reagents, agriculture, chemicals, and high-performance materials. 【VP4 Series Lineup】 ■VP4-501 ■VP4-651 ■VP4-801 For more details, please contact us or download the catalog.
Prevent the deterioration of vacuum pump oil and damage to the internal mechanisms of the pump! Remove harmful water vapor.
The JRS series vacuum separator/filter protects vacuum pumps from harmful water vapor and liquids that can degrade vacuum pump oil or damage the internal mechanisms of the pump. The removal of harmful water vapor involves cooling it from a gaseous state to a liquid state for discharge. Additionally, solid particles such as dust contained in the fluid are removed by the final stage filter. 【Features】 - Easily cleanable fin-type heat exchanger that can be used for long periods under optimal conditions - Robust structure made of carbon steel - Efficient inlet accuracy - 25A cooling water supply port *For more detailed specifications, please download the catalog or contact us directly.
High-durability dry vacuum pump suitable for all processes! Specialized for process performance.
The "SDE Series" is a dry vacuum pump from Kashiyama Industry, which has gained high trust in a wide range of fields, including semiconductor and liquid crystal manufacturing. It employs a vertical screw with excellent anti-deposition performance, demonstrating high corrosion resistance due to structural materials and temperature settings. The unique screw design achieves energy savings. 【Examples of Compatible Processes】 ■ Metal-Etch ■ SA-CVD ■ Metal-CVD ■ PE-CVD ■ LP-CVD ■ ALD *For more details, please refer to the PDF document or feel free to contact us.
Large displacement pumps that accommodate the increase in diameter of wafers and FPDs.
The "SDL Series" is a dry vacuum pump from Kashiyama Industries, which has gained high trust in a wide range of fields, including semiconductor and LCD manufacturing. It accommodates the increasing size of wafers and FPDs. By combining units, it can achieve a large exhaust capacity, meeting requests for over 150,000 L/min. Furthermore, by ensuring exhaust speed on the atmospheric side, it shortens the cycle time through rapid exhaust of large load lock chambers. There is also a solvent exhaust specification available, so please inquire for details. 【Features】 ■ Accommodates the increasing size of wafers and FPDs ■ Shortens cycle time *For more details, please refer to the PDF materials or feel free to contact us.
