Laser vibration measurement device for semiconductors
Real-time measurement of vibration and displacement in microfabrication.
In the semiconductor industry, high precision in the manufacturing process is required for microfabrication. Particularly in the processing of fine structures, vibrations and displacements significantly affect product quality. Accurately understanding and controlling these factors is essential for improving yield. The VibroMap 1000 visualizes vibrations and displacements in microfabrication in real-time through non-contact, high-sensitivity measurements, supporting quality control and process improvement. 【Application Scenarios】 - Vibration analysis in microfabrication processes - Quality assessment of semiconductor devices - Vibration countermeasures for manufacturing equipment 【Benefits of Implementation】 - Improved processing accuracy - Enhanced yield - Increased product reliability
- Company：シスコム（SysCom）
- Price：10 million yen-50 million yen
