Software "HyperLith(TM)"
User-friendly and powerful lithography simulation software.
"HyperLith(TM)" is software that supports scalar calculations and exact solutions, compatible with EUV and DUV technologies. It predicts the outline of simulation results using the LiveView GUI. Additionally, with the new GDS export feature, you can export a programmed series of patterns to a GDS file, which can be useful for creating test masks. [Features] - Supports Polarization, Aberrations, and Resist - Supports hardware acceleration, parallel processing, and distributed computing capabilities - Supports Windows and Linux - Exports to EM-Suite as .sim files *For more details, please download the PDF or feel free to contact us.
- Company：インターソフト 本社
- Price：Other
