Automated solution for plasma treatment
Achieving continuous plasma processing through automatic loading and unloading with OHT and AGV/AMR systems!
We provide plasma systems designed to be integrated into various transport architectures. These systems improve equipment operating rates through continuous substrate supply, enhance yield by reducing exposure to contamination, and achieve complete process traceability through integrated recipe management and SECS/GEM connectivity. Please feel free to consult us when you need assistance. 【Product Lineup】 ■GIGA690 AUTO ■80Plus AUTO ■AUTOfab GIGA690 ■AUTOfab 80Plus ■GIGAfab Modular *For more details, please download the PDF (English version) or feel free to contact us.
- Company：PVA Japan
- Price：Other
