10nm Feedback Stage FS-3200X/XY
"Precision positioning device" with high resolution, excellent positioning repeatability, and strong position retention after positioning!
This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controller FC-514.
- Company：シグマ光機
- Price：Other
