"Precision positioning device" with high resolution, excellent positioning repeatability, and strong position retention after positioning!
This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controller FC-514.
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basic information
Minimum resolution: 10nm Maximum movement speed: 20mm/sec (when using FC-514) Stroke: 200mm Compatible controller: FC-514 ■For details, please request materials or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical application areas include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.