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  6. 1nm Feedback Stage FS-1050UPX / XY

1nm Feedback Stage FS-1050UPX / XY

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FS-1050UPX / FS-1050UPXY

last updated:Jun 03, 2019

シグマ光機
シグマ光機
  • Official site

"Precision positioning device" maintains its high resolution of 1nm while achieving faster movement speed!

This is a precision positioning stage that incorporates an optical linear encoder, allowing for closed-loop control with a resolution of '1nm' based on the reading values of the built-in scale. The stroke is '50mm', enabling both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

    Other FA equipment
fs1050upx_images.jpg

1nm Feedback Stage FS-1050UPX / XY

fs1050upx_images.jpg
fs1050upx_images.jpg
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

Minimum resolution: 1nm Maximum moving speed: 5mm/sec (when using FC-911) Stroke: 50mm Table size: □120mm Built-in scale: Quartz glass Compatible controller: FC-911

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Applications/Examples of results

The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples: Positioning during MEMS inspection Optical system delay stage Microscope stage

catalog(3)

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Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

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1nm Feedback Stage System Catalog

1nm Feedback Stage System Catalog

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Precision Positioning Stage 'Q&A You Should Know When Selecting'

Precision Positioning Stage 'Q&A You Should Know When Selecting'

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CAD data(1)

Model number overview File
DWG-DXF_FS-1050UPX This is a complete set of drawings for the 1nm resolution stage FS-1050UPX. We have 2D formats available in "DXF" and "DWG".
  • 2D zip ( 131KB)

Company information

シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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