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  6. 10nm Feedback Stage FS-3150X/XY

10nm Feedback Stage FS-3150X/XY

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FS-3150PX FS-3150PXY

last updated:Jun 03, 2019

シグマ光機
シグマ光機
  • Official site

"Precision positioning device" with high resolution, excellent positioning reproducibility, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 150mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

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22.jpg

10nm Feedback Stage FS-3150X/XY

22.jpg
22.jpg
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

Minimum resolution: 10nm Maximum moving speed: 10mm/sec (when using FC-511) Stroke: 150mm Compatible controller: FC-511 ■For details, please request documentation or download the catalog■

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Applications/Examples of results

The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples: Positioning during MEMS inspection Delay stage in optical systems Microscope stage

catalog(3)

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Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

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Precision Positioning Stage 'Q&A You Should Know When Selecting'

Precision Positioning Stage 'Q&A You Should Know When Selecting'

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10nm Feedback Stage System Catalog

10nm Feedback Stage System Catalog

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Company information

シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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