Self-rotating spin dryer
Self-rotating spin dryer
■ The intake volume is large, so the drying efficiency is approximately doubled (compared to our company) compared to the N2 replacement method. Furthermore, there is a significant cost reduction. ■ The ionizer for the intake air is vastly more efficient than that of N2! It prevents contamination of the wafers. ■ The main cause of particle generation, the bearing section, adopts a unique structure from Omiya Industry that has a proven track record with a rotary type. It always maintains a clean state. ■ An automatic balance adjustment device can also be installed as an option. It cancels out vibrations caused by differences in the number of sheets and weight differences in the carrier.
- 企業：大宮工業 営業本部営業課
- 価格：Other
