Temperature sensor for ASM Epsilon
New coating technology triples sensor lifespan! Achieves up to 45% cost reduction!
This time, we have adopted a new technology called "EtchDefender," developed by the U.S. company CONAX, which enables us to extend the lifespan of sensors up to three times longer than conventional ones by reducing foreign material adhesion on wafers, slowing down the etch rate, and decreasing the erosion rate! "EtchDefender" is a reliable technology that has been validated over several years in research institutions and manufacturing facilities of major wafer manufacturers. With this new coating technology, we can extend the lifespan of sensors and achieve significant cost reductions of 35-45%. *For more details, please refer to the catalog. Feel free to contact us as well.
- Company:IBPテクノロジー
- Price:Other