Possible response to centralized management systems through digitalization. [ULVAC]
This is a turbo molecular pump with a composite wing design that employs digital 5-axis controlled magnetic bearings. The UTM-FH and UTM-FW achieve advantages such as high functionality, high reliability, and energy-saving capabilities due to the adoption of digital 5-axis controlled magnetic bearings. The FH series is designed for light to middle processes with high back pressure and high compression ratios, while the FW series is suitable for wide-range, high-flow applications for high-load processes and middle to hard processes.
【Features】
○ Equipped with monitoring and self-diagnosis functions, as well as communication capabilities, enabling compatibility with centralized management systems through digitalization.
○ Incorporates a coupling-free system, allowing operation in combination with registered pump bodies using a single power supply by switching models.
○ Features a speed variable system, allowing exhaust speed to be adjusted within a range of 25% to 100%.
○ With excellent corrosion-resistant surface treatment, special surface treatment and internal heating systems are available as options for more demanding processes (FW series).
○ Adopts a destructive energy absorption structure, designed for high safety by minimizing equipment damage during malfunctions.
For more details, please contact us or download the catalog.
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