Oil-lubricated spherical bearing type turbo molecular pump
**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.
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basic information
【Product Features】 ○ Chemical type strong against corrosive gas exhaust ○ Structure resistant to unexpected atmospheric intrusion ○ Strong against external impacts ○ Capable of serial communication ○ Safety standard certification obtained: NRTL / SEMI-S2 / CE ● For other functions and features, please refer to the catalog or contact us.
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Applications/Examples of results
Semiconductor manufacturing Electron gun evacuation, ion source evacuation FPD manufacturing Surface treatment, surface modification Manufacturing of various electronic components Tube manufacturing, optical component manufacturing Accelerators, radiation facilities, nuclear fusion research Heat treatment Research and development For more details, please contact us.
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Company information
We provide our customers with reliable products that can be used with peace of mind, satisfaction, and for a long time! Osaka Vacuum is committed to offering vacuum equipment that satisfies our customers by setting four major goals: "Customization," "Advanced Safety Measures," "Future-Oriented," and "Customer Support System," and we are dedicated to realizing and further deepening these goals.