STWHR4156 (Waterproof compatible)
This is the STWHR4156 series of waterproof 4-axis cylindrical coordinate robots.
It can transport wafers in environments where water is present or in wet conditions. It is capable of transporting wafers in environments where people cannot enter and touch the wafers due to chemicals. It is suitable for transporting wafers in acidic and alkaline mist atmospheres during the LSI manufacturing process. The arm section ensures corrosion resistance with a Teflon coating. The arm joint section uses a V-seal for waterproofing. The joints of the components are sealed with a Viton packing. The Z-axis section can also accommodate a bellows for waterproofing. The adoption of a twin arm reduces wafer exchange time. It is equipped with an operation monitor. Control method: RS232C and parallel photo I/O. All axes use two-phase stepping motors. The S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. Wafer holding methods include vacuum suction, drop-in, and edge grip chucks. It can accommodate optimal chucks tailored to the transported items and equipment layout.
- 企業：ジェーイーエル
- 価格：Other
