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Vibration Sensing System "miRadar CBM"

Application of 79GHz millimeter-wave radar technology! Achieving vibration measurement unaffected by mechanical resonance or high temperatures.

The "miRadar CBM" is a high-precision, high-frequency vibration sensing system that enables non-contact measurement of mechanical vibrations. It achieves condition-based maintenance and environmental measurement in scenarios where the installation of contact-type sensors is difficult, such as semiconductor manufacturing lines under vacuum. It also features an SDR architecture that can be controlled via a software API, making future upgrades and customer-specific customizations easy. 【Features】 ■ Enables spot measurements in narrow areas with a built-in lens antenna ■ Achieves wideband, high-frequency vibration measurement up to 40KHz ■ Measures extremely small displacements of approximately 0.03µm (pk-pk) ■ Ethernet interface & PoE power supply *For more details, please download the PDF or feel free to contact us.

  • Sensors
  • 振動センシングシステム

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