ＩＢＳ List of Products and Services

The "Aera Transformer" is a digital mass flow controller suitable for various applications such as CAD, PVD, diffusion, and etching. The thin film growth and etching characteristics produced by this product boast excellent homogeneity and high reproducibility. With outstanding responsiveness, accuracy, and reproducibility, it enhances the productivity and yield of the equipment. 【Features】 ■ Multi-gas, multi-range ■ High-speed responsiveness ■ 100% metal seal, high-purity design ■ Compatible with DeviceNet, RS-485, and analog control *For more details, please refer to the PDF document or feel free to contact us.

The "Aera FC-DR980" is a digital mass flow controller that offers excellent versatility and is compatible with many systems. With high-quality electronic components and a durable design, it withstands harsh operations and demonstrates outstanding long-term zero drift stability of less than 0.5% of full-scale flow even after more than a year. 【Features】 ■ Selectable modes: Analog, Analog/Digital, Digital ■ Piezo-controlled valve ■ Various alarm/diagnostic functions ■ Selectable gases and flow ranges 　※ Supported by multi-gas and multi-range specification models *For more details, please refer to the PDF documentation or feel free to contact us.

The "Aera PI-980" is a pressure-sensitive type mass flow controller developed in anticipation of the growing demand for next-generation semiconductor manufacturing processes. With excellent flow stability, it enhances process reproducibility between chambers and improves production yield. Additionally, it has been verified for accuracy with real gases and supports multi-gas and multi-range applications. 【Features】 - Capable of pressure-insensitive control (less affected by pressure) - High measurement accuracy and reproducibility - Compatible with IGS method - Verified for accuracy with real gases, supports multi-gas and multi-range - Programmable in the field *For more details, please refer to the PDF materials or feel free to contact us.

The "Aera FC-R7700 Series" is a mass flow controller that performs well in various applications in the field. It demonstrates its capabilities in high-precision flow control and improves cost-effectiveness by adopting rubber seals. Additionally, it features a fast response time, stabilizing flow in less than 2 seconds after setting the value. 【Features】 ■ Elastomer (rubber) seals ■ Connections compliant with VCR, VCO, and Swagelok standards ■ Full-scale flow range from 10 sccm to 200 slm ■ Normally closed or normally open solenoid control valves ■ External leak rate of less than 1.0x10-7 Pa·m3/sec (He) *For more details, please refer to the PDF document or feel free to contact us.

The "Aera FC-R7800 Series" is a system that not only performs high-precision flow control but also features excellent airtightness due to its metal seals. It is suitable for major gas control applications. Thanks to advancements in technology, such as the incorporation of highly sensitive and fast-response small sensors, it demonstrates excellent controllability. 【Features】 ■ Corrosion-resistant design ■ Metal seal adoption ■ VCR and Swagelok compatible connections ■ Full-scale flow range from 10 sccm to 200 slm ■ Normally closed or normally open solenoid control valves *For more details, please refer to the PDF materials or feel free to contact us.