山梨技術工房 Product Lineup

Non-patterned SiC bulk wafer 0.1μm detection. Detection of micro-scratches. Ideal for confirming the cleaning of SiC and GaN wafers. Automatic and manual transport options are available. Microscopic observation function allows for review after measurement.

• Other inspection equipment and devices

In addition to silicon wafers, double-polished transparent wafers and single-side polished translucent wafers (back matte wafers) can also be measured. You can choose between automatic transport specifications and manual transport specifications. There is an option for microscope observation that allows for review after measurement.

• Other inspection equipment and devices

It is a non-pattern wafer and substrate surface particle inspection device. It is a manual transport tabletop inspection device that does not take up much space. It is easy to install in labs or next to equipment. It can measure not only silicon but also glass materials.

• Other inspection equipment and devices