ナガセテクノエンジニアリング List of Products and Services

The "Micro Mist Coater" is a spray coating device that utilizes the phenomenon of electro-spray to atomize liquids for application. It can accommodate various fine particles, ultra-fine liquids, filler dispersions, slurries, pastes, and liquids with a wide range of viscosities (from a few cp to several thousand cp), including metals, carbon, glass, and phosphors. Due to the electrostatic force, the finely misted liquid is attracted to the substrate, minimizing mist dispersion. 【Features】 ■ Compatible with fine particle coatings ■ Reduces liquid material costs ■ Maintains a clean working environment ■ High uniformity of film thickness ■ Suitable for coating uneven substrates *For more details, please visit our website or refer to the PDF materials, and feel free to contact us.

• Other processing machines

The "m-Highest V" is a multifunctional high-shear vacuum mixer capable of emulsifying, dispersing, stirring, mixing, and dissolving powders in a batch-type all-in-one process, handling products with various physical properties from low viscosity to high viscosity. During operation, the mixer can switch between large circulation mode and high-shear mode, accommodating unique process formulations. In addition to production machines with capacities ranging from 100L to 20,000L, we also offer models for experimental and research and development purposes with capacities from 2L to 20L. 【Features】 ■ Batch-type all-in-one process ■ Switchable between large circulation mode and high-shear mode during operation ■ Capable of accommodating unique process formulations ■ Allows for mixing in a short time while suppressing excessive foaming and clumping ■ Can achieve micronization in half the time compared to general-purpose mixers.

• Mixer/agitator

The product is an innovative mobile electrostatic carrier developed by Eshylon Scientific. By adhering and reinforcing a thin substrate to a dedicated carrier, it handles fragile substrates without damage. Warped ultra-thin wafers can also undergo conventional processes on existing lines. With exceptional yield and high processing capacity, it meets the needs for substrate thinning. 【Features】 ■ High throughput ■ Improved yield ■ Low cost ■ Wide range of applications ■ No adhesive used *For more details, please visit our website or refer to the PDF materials, and feel free to contact us.

• others

We are introducing H-Square's "Board Handling Tools and Equipment." We offer a variety of compact tabletop automatic devices and manual tools, including "Automatic Wafer Transfer Machines," "Wafer Notch/Flat Aligners," and "Wafer Lifters," as well as traditional options like "Vacuum Tweezers" and "Mechanical Picks." 【Product Lineup】 ■ Wafer Transfer Machines ■ Wafer Aligners ■ Wafer Lifters ■ Vacuum Tweezers ■ Mechanical Edge Picks ■ Metal Cassettes ■ Mask Picks, etc. *For more details, please visit our website and feel free to contact us.

• Other semiconductor manufacturing equipment

We are introducing the ePAK company's "Process Wafer Cassette / Transport Wafer Case/Wafer Tray." Starting with the "Process Wafer Cassette," we also offer various options for "Transport Wafer Cases/Wafer Trays," including single, 25-piece, and jar types, as well as many other products like "Flex Frames" and "HOOP Rings." Please make use of this information when selecting products. [Contents] ■ Process Wafer Cassette ■ Wafer Shipping Containers ■ Wafer Jars ■ Single Cases (Wafer Trays) *For more details, please visit our website and feel free to contact us.

• others

The "Cleaning Cassette" is a PTFE cassette that excels in chemical resistance and abrasion resistance, suitable for cleaning printed circuit boards and photomasks. It can be manufactured in the desired size, shape, and number of slots for printed circuit boards, and we can also produce detachable handles. Additionally, we offer "Cleaning Beakers" made of PTFE or quartz. Our company accepts the design and production of custom products that excel in chemical resistance and abrasion resistance. We can accommodate various design requests. Please contact us for more details. 【Features】 ■ Material: PTFE ■ Compatible with various printed circuit board sizes ■ Designed and manufactured to the requested size, shape, and number of slots ■ Can be produced from a single unit ■ Suitable for cleaning printed circuit boards and photomasks *For more details, please visit our website or refer to the PDF materials, and feel free to contact us.

• Other cleaning machines

"KOACH" is an open clean system that is easy to install and does not enclose the workspace, making it easy to work in. It quickly expels contamination from the work area and maintains cleanliness within the space. Additionally, its compact design allows it to be installed in various locations, whether in a laboratory or a production site, wherever it is needed. 【Features】 ■ Achieves a clean space in a short time after operation ■ Open structure for easy working ■ Quickly expels contamination from the work area ■ Compact and does not require a specific installation location ■ Easy to install

• Other clean room equipment and facilities

The "Bonavista Multi-Pass Filter Testing Device" is a testing apparatus that accurately measures the filtration performance and efficiency of various filters in a short time based on ISO standards. 【Features】 ■ Test system ■ Spacious internal space ■ Computer control and data acquisition ■ Dilution device and automatic cleaning system ■ Applicable standards: ISO CD 23369, ISO 4548-12, ISO 16889, ISO 3968 *For more details, please visit our website or refer to the PDF materials, and feel free to contact us.

• Testing Equipment and Devices

The pulse tube refrigerator consists of a compressor, a cold storage device, and a simple tube called a pulse tube. The main difference from a GM refrigerator is that the cold storage material does not move back and forth within the cylinder, resulting in less vibration during operation. Additionally, since the cold storage material is fixed, there are fewer moving parts compared to a GM refrigerator, leading to reduced maintenance frequency. The features of the pulse tube refrigerator manufactured by Sumitomo Heavy Industries include improvements that enhance the single-stage refrigeration capacity, effectively reducing the amount of heat entering from the outside and allowing for effective utilization of the two-stage refrigeration capacity. For more details, please contact us or refer to the catalog.

• Refrigerators and freezers
• Cooling system

The ultra-low temperature freezer 4K GM freezer RDK-415D is a mechanical refrigeration unit that generates cold by having the refrigerant material move back and forth inside a cylinder, allowing the refrigerant gas to expand adiabatically. The method of moving the refrigerant material back and forth in the GM freezer manufactured by Sumitomo Heavy Industries utilizes a crank mechanism to convert the rotational motion of the motor into reciprocating motion. Additionally, by innovating the two-stage refrigerant material seal, it is the world's first freezer that does not have restrictions on the installation direction of the 4K freezer. For more details, please contact us or refer to the catalog.

• Refrigerators and freezers
• Cooling system

The ultra-low temperature refrigerator 4K GM refrigerator RDK-408D2 is a mechanical refrigeration unit that generates cold by having a storage refrigerant move back and forth within a cylinder, causing the refrigerant gas to undergo adiabatic expansion. The method of moving the storage refrigerant back and forth in the GM refrigerator manufactured by Sumitomo Heavy Industries utilizes a crank mechanism to convert the rotational motion of the motor into reciprocating motion. Additionally, innovations in the two-stage storage refrigerant seal make it the world's first refrigerator that is not restricted by installation direction for 4K refrigeration. For more details, please contact us or refer to the catalog.

• Refrigerators and freezers
• Cooling system

The ultra-low temperature refrigerator 40K GM refrigerator RDK-400B is a mechanical refrigeration unit that generates cold by having a storage refrigerant move back and forth inside a cylinder, allowing the refrigerant gas to expand adiabatically. The method used to move the storage refrigerant in the GM refrigerator manufactured by Sumitomo Heavy Industries utilizes a crank mechanism to convert the motor's rotational motion into reciprocating motion. Additionally, innovations in the two-stage storage refrigerant seal make it the world's first refrigerator that has no restrictions on the installation direction of a 4K refrigerator. For more details, please contact us or refer to the catalog.

• Refrigerators and freezers
• Cooling system

The ultra-low temperature refrigerator 4K GM-JT refrigerator is a 4K refrigerator that adds a Joule-Thomson (JT) expansion section to a two-stage refrigerator. The 4K refrigeration capacity utilizes the latent heat of helium, making it a highly efficient machine compared to expansion-type refrigerators such as GM refrigerators and pulse tube refrigerators. Additionally, since it utilizes latent heat, one of its features is that it has very little temperature fluctuation. For more details, please contact us or refer to the catalog.

• Refrigerators and freezers
• Cooling system

The MARATHON CP-250LP CRYOPUMP has no oil present in the exhaust system, eliminating reverse diffusion. Since the oil of the roughing pump used before startup can be set to a high crossover pressure, there is no concern about reverse diffusion, achieving a clean vacuum essential for advanced industries. An optional system with automatic regeneration control is available. With one HC-8E4 or F-70 compressor, it can operate up to two cryopumps. For more details, please contact us or refer to the catalog.

• Vacuum pump

The MARATHON CP-20 CRYOPUMP has no oil present in the exhaust system, eliminating reverse diffusion. Since the oil of the roughing pump used before startup can be set to a high crossover pressure, there is no concern about reverse diffusion, achieving a clean vacuum essential for advanced industries. You can choose from mounting flanges of ISO500, ANSI 20", or wire seal flanges. An optional system with automatic regeneration control is also available. For more details, please contact us or refer to the catalog.

• Vacuum pump

The MARATHON CP-16 CRYOPUMP has no oil present in the exhaust system and no reverse diffusion. Since the oil of the roughing pump used before startup can be set to a high crossover pressure, there is no concern about reverse diffusion, achieving a clean vacuum essential for advanced industries. You can choose the mounting flange from ISO400, CVC10", or wire seal flanges. An optional system with automatic regeneration control is also available. For more details, please contact us or refer to the catalog.

• Vacuum pump

The MARATHON CP-12 CRYOPUMP has no oil present in the exhaust system, eliminating reverse diffusion. Since the oil of the roughing pump used before startup can be set to a high crossover pressure, there is no concern about reverse diffusion, achieving a clean vacuum essential for advanced industries. The mounting flange can be selected from ANSI 10", ISO 320, or CF 14". An optional system with automatic regeneration control is available. For more details, please contact us or refer to the catalog.

• Vacuum pump

The MARATHON CP-8LP CRYOPUMP allows you to choose a mounting flange from ANSI 6", ISO 200, or CF 10". An optional system with automatic regeneration control is available. With one HC-8E4 or F-70 compressor, you can operate up to two cryopumps. For more details, please contact us or refer to the catalog.

• Vacuum pump

The MARATHON CP-8 CRYOPUMP allows you to choose a mounting flange from ANSI 6", ISO 200, or CF 10". An optional system with automatic regeneration control is available. With one HC-8E4 or F-70 compressor, you can operate up to two cryopumps. For more details, please contact us or refer to the catalog.

• Vacuum pump

The 77K GM Refrigeration Machine CH-110 is a mechanical refrigeration unit that generates cold by having the heat storage material move back and forth inside a cylinder, causing the refrigerant gas to undergo adiabatic expansion. The method used to move the heat storage material back and forth in the GM refrigeration machine, manufactured by Sumitomo Heavy Industries, utilizes a crank mechanism to convert the motor's rotational motion into reciprocating motion. Additionally, innovations in the two-stage heat storage material seal make this refrigeration unit the world's first refrigeration machine that does not have restrictions on the installation direction of the 4K refrigeration unit. For more details, please contact us or refer to the catalog.

• Refrigerators and freezers
• Cooling system

1. Composite fermentation-type circulation system 2. Metal ion-type circulation system

• others

Achieve a reduction in the use of chemical substances and wastewater, as well as energy and resource conservation.

• LCD display
• Other semiconductors

HVA's high vacuum valves and ultra-high vacuum valves offer a wide variety of gate valves and slit valves suitable for various fields, including semiconductor manufacturing equipment and research instruments.

• Vacuum Equipment

Cryogenic Refrigerators and Superconducting Application Technology Superconducting application technology, which is being discussed in various fields such as energy, computers, transportation, communication, and even everyday healthcare, is one of the extreme physical properties brought about by the world of cryogenic temperatures close to absolute zero (minus 273°C). In this state, electrical resistance becomes zero, leading to phenomena such as magnetic levitation (Meissner effect) and ultra-fast switching (Josephson effect), resulting in physical properties that are unimaginable in our normal temperature world, emerging from the interactions of ions and electrons at cryogenic temperatures. Superconductivity was first discovered in 1911 when a Dutch scientist cooled mercury to 4.2 K (Kelvin). Since then, over the course of about 100 years, refrigeration technology has evolved remarkably, and along with it, research and development related to superconductivity has made significant progress. Superconductivity is said to be a key technology of the 21st century. Even in terms of energy-related application technologies, its role is increasingly significant as a technology that maximizes the use of Earth's energy while protecting the beautiful environment of our planet. Leveraging years of experience in refrigeration technology, we sell unique helium-specific compressors and high-performance cryogenic refrigerators.

• Vacuum Equipment

Essential "Ultra-High Vacuum" "Ultra-high vacuum" is indispensable in semiconductor manufacturing processes and plays a crucial role in fundamental research related to new materials and elementary particles. Achieving cleaner vacuum, more advanced vacuum control, and a broader range of vacuum pressure areas will lead to greater outcomes in cutting-edge science and technology. High Pumping Speed and Clean Vacuum Quality We have launched a cryopump unit developed from our extensive air conditioning technology, featuring a unique helium compressor and a Sorbey cycle refrigeration method. With high pumping speed, clean vacuum quality, and above all, its reliability and perfected functionality, it has been highly regarded in various fields. In response to the demand for increased productivity and efficiency, we have expanded our lineup, and the increasingly comprehensive Marathon CP series is categorized by series. Here, vacuum quality speaks for itself.

• Vacuum Equipment