フォトンデザイン List of Products and Services

The "SemiScope PLIS-TEC" is a groundbreaking measurement device for the study of crystal defects using photoluminescence (PL). It allows for the simultaneous measurement of spectra from a selected line segment in a PL imaging image, dividing that segment into 1000 points. Additionally, by spectrally analyzing the line segment, it can accurately measure spectra even for defects that are difficult to pinpoint, such as base plane transitions. 【Features】 ■ Supports spectral line analysis ■ For the study of crystal defects ■ The excitation light density is approximately three orders of magnitude lower than that of conventional PL spectral measurements ■ Capable of measuring extended defects ■ Accurately measures spectra even for defects that are difficult to locate *For more details, please refer to the PDF document or feel free to contact us.

• Semiconductor inspection/test equipment
• Other measurement, recording and measuring instruments

"SemiScope" is a PL imaging device that can measure photoluminescence (PL) images with a resolution of less than 1μm. By using a tiling function that allows imaging measurements while moving the sample, it is possible to obtain PL images of the entire 6-inch wafer with a resolution of approximately 3.3 billion pixels. It visualizes crystal defects in SiC wafers. Non-contact and non-destructive testing can be performed quickly using the PL imaging method. 【Features】 - SiC semiconductor evaluation device - Visualization of crystal defects in SiC wafers - Non-contact, non-destructive testing - Short measurement time possible due to PL imaging method For more details, please contact us or download the catalog.

• Semiconductor inspection/test equipment