SiC semiconductor evaluation device using photoluminescence (PL) imaging method
"SemiScope" is a PL imaging device that can measure photoluminescence (PL) images with a resolution of less than 1μm. By using a tiling function that allows imaging measurements while moving the sample, it is possible to obtain PL images of the entire 6-inch wafer with a resolution of approximately 3.3 billion pixels. It visualizes crystal defects in SiC wafers. Non-contact and non-destructive testing can be performed quickly using the PL imaging method. 【Features】 - SiC semiconductor evaluation device - Visualization of crystal defects in SiC wafers - Non-contact, non-destructive testing - Short measurement time possible due to PL imaging method For more details, please contact us or download the catalog.
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【Product Lineup】 ○ High-speed PL Imaging Device SemiScope PLI-SR → Aiming for mass production process equipment, it combines photon design's PL imaging technology with high-speed technology. ○ PL Imaging Device SemiScope PLI-200 → Standard model of PL imaging device for SiC evaluation. ○ PL Spectrum Imaging Device SemiScope PLIS-200 → A PL imaging device for SiC semiconductors that can measure the spectrum of crystal defect areas in addition to PL imaging measurement functions. ● For more details, please contact us or download the catalog.
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Photon Design Co., Ltd. is a manufacturer of spectroscopic measurement devices, including photoluminescence and Raman devices. We are constantly incorporating new technologies and striving for the highest performance in our equipment development. The recent trend of prioritizing management efficiency has also affected the field of research equipment. As highly marketable research devices are being commercialized one after another, the production of top-quality research devices with low sales numbers is becoming increasingly rare. However, Photon Design believes that for research equipment that plays a crucial role in cutting-edge scientific research challenging the unknown, there can be no compromise on performance. As a manufacturer of spectroscopic measurement devices, we will continue to seek the highest performance and develop our equipment.