Particle size, quantity, and pattern. A coating device that does not compromise.
MSP Corporation is a company that provides high-precision particle coating technology for the semiconductor and device fields. At the core of its offerings is a patented DMA classification technology, which enables the precise control of particle size and coating quantity with high reproducibility through its particle coating equipment and coating services. MSP's particle coating equipment can accurately apply particles ranging from the nanometer to micrometer scale on substrates, including 300mm wafers, and supports various coating patterns such as spot, full area, ring, and edge-arc. In addition to standard particles like PSL and SiO₂, it also accommodates various process particles that simulate actual processes.
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basic information
■Supported Substrates 300mm wafers (200mm support is optional) ■Applicable Particle Size - DMA mode PSL: 10 to 2000nm SiO₂: 10 to 1600nm - Direct mode PSL / SiO₂: up to 3000nm ■Applicable Particles - PSL - SiO₂ - Process particles ■Coating Patterns - Spot - Full surface - Ring - Edge arc Up to 16 sizes of particle coating per recipe (PSL / SiO₂) ■Other Specifications - Patent obtained for DMA classification device - NIST traceable calibration (using NIST standard particles)
Price information
The price depends on the specifications, so please feel free to contact us.
Delivery Time
※The delivery date depends on the specifications, so please feel free to contact us.
Applications/Examples of results
■Main Applications - Particle coating for evaluation and calibration of wafer surface inspection equipment - Evaluation of particle removal performance (PRE) of cleaning equipment ■Adoption Results (Equipment) - USA: Company I - Singapore: Company K - South Korea: Company S - Taiwan: Company T - Japan: Companies H, T, R, and others There are adoption results with equipment manufacturers and device manufacturers around the world.
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Company information
GSI Creos is a unique "business creation trading company" that builds mechanisms for creating new value together with our business partners in the fields of textiles, focusing on innerwear-related products, and industrial products, focusing on chemical-related products. In the textile field, we integrate our development and procurement capabilities for differentiated materials, coordination of production and logistics, and analysis of customer information to provide raw materials and products that meet market needs, particularly in areas such as innerwear, legwear, and outerwear. In the industrial products sector, we leverage our domestic and international networks to offer high-value-added and unique products in the fields of chemicals, machinery and materials, and hobbies and lifestyle. As a strategic business, we are focusing on the development and commercialization of products that bring groundbreaking added value in the field of nanotechnology, where a material revolution is anticipated. Our slogan is "Produce the Future," and we are also attentive to environmental issues, contributing to the realization of a richer society.
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