ATONARP INC. List of Products and Services

We would like to introduce a technical note using the mass spectrometer ASTON. < List of Technical Notes > 1. ASTON Technical Note_vol.2_Measurement of Krypton in Air 2. ASTON Technical Note_vol.3_Measurement of Tungsten Etching 3. ASTON Technical Note_vol.4_Reproducibility *Technical notes will be added as needed.

• Other inspection equipment and devices

We would like to introduce application notes using the mass spectrometry device ASTON. <Application Note List> 1. ASTON Application Note_vol.1_Chamber Cleaning 2. ASTON Application Note_vol.3_Simple Component Analysis of Ethanol 3. ASTON Application Note_vol.2_High Sensitivity Endpoint Detection_Etching Process Monitoring *Application notes will be added as needed.

• Other inspection equipment and devices

The "ASTON Impact" is a highly sensitive mass spectrometer suitable for process gas monitoring specialized in gas analysis. It is an electronic ionization ion source model that pursues cost performance and ease of use. It is space-saving and capable of monitoring gases from atmospheric pressure regions. Despite its compact size, it has successfully achieved high sensitivity measurements that surpass competitors as a mass spectrometer for process gas monitoring, with a mass range extended up to m/z 285. It features a quadrupole-type compact sensor equipped with an electronic ionization ion source and a secondary electron multiplier, designed with a space-saving packaging that includes a pump. 【Main Applications】 ■ Process condition monitoring (etching, film deposition) ■ Endpoint monitoring (etching, cleaning) ■ Chamber contamination monitoring ■ Residual gas analysis for gas abatement systems ■ Environmental monitoring ■ Fermentation process monitoring ■ Natural gas analysis monitoring ■ Lyophilization (Freeze-Drying) *For more details, please contact sales-jp@atonarp.com.

• Analytical Equipment and Devices

We will introduce the basic structure of mass spectrometers and the information obtained from them. <Basic Course List> 1. Part 1: Basic Structure of Mass Spectrometers We will introduce the fundamental knowledge of mass spectrometry, focusing on the structure of mass spectrometers. 2. Part 2: Electron Ionization (EI) - Information Obtained from Quadrupole Mass Spectrometers We will introduce the essential knowledge needed for multi-component gas analysis.

• Other inspection equipment and devices