Introduction to the Application Note for the Mass Spectrometry Device ASTON
ASTON Impact / ASTON Plasma
We will introduce various applications using the mass spectrometry device ASTON.
We would like to introduce application notes using the mass spectrometry device ASTON. <Application Note List> 1. ASTON Application Note_vol.1_Chamber Cleaning 2. ASTON Application Note_vol.3_Simple Component Analysis of Ethanol 3. ASTON Application Note_vol.2_High Sensitivity Endpoint Detection_Etching Process Monitoring *Application notes will be added as needed.
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basic information
Please refer to various applications using the mass spectrometer ASTON. *Application notes will be added as needed.
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Applications/Examples of results
■Process Condition Monitor (Etching/Film Deposition) ■Endpoint Monitor (Etching/Cleaning) ■Chamber Contamination Monitor ■Residual Gas Analysis of Gas Abatement System ■Environmental Monitor ■Fermentation Process Monitor ■Natural Gas Analysis Monitor
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Company information
Atonarp Inc. is an equipment manufacturer with bases in Japan, the United States, and India. We develop and manufacture high-quality equipment for the semiconductor, natural gas, and pharmaceutical industries.
![[Application Data] Example of Analysis of Cationic Surfactants](https://image.mono.ipros.com/public/product/image/419/2000813362/IPROS90828576391637526818.png?w=280&h=280)
![[Analysis Case] Investigation of Foreign Object Occurrence: Analysis of the Tube](https://image.mono.ipros.com/public/product/image/387108/IPROS13070285683371051248.jpg?w=280&h=280)
![[Analysis Case] Qualitative and Imaging Analysis of Micro Areas Using TOF-SIMS](https://image.mono.ipros.com/public/product/image/dbd/2000287063/IPROS7457515137597281490.jpg?w=280&h=280)
![[Analysis Case] Distribution and State Evaluation of OH on Aluminum (Al) Surface](https://image.mono.ipros.com/public/product/image/2e6/2000245608/IPROS80672769150570683250.jpeg?w=280&h=280)
![[Analysis Case] Evaluation of Transdermal Absorption of Indomethacin in Three-Dimensional Cultured Human Skin](https://image.mono.ipros.com/public/product/image/98a/2000309800/IPROS7545183631198236681.jpg?w=280&h=280)
