Introduction to the Technical Note of the Mass Spectrometry Device ASTON
ASTON Impact / ASTON Plasma
We will introduce various technical documents using the mass spectrometry device ASTON.
We would like to introduce a technical note using the mass spectrometer ASTON. < List of Technical Notes > 1. ASTON Technical Note_vol.2_Measurement of Krypton in Air 2. ASTON Technical Note_vol.3_Measurement of Tungsten Etching 3. ASTON Technical Note_vol.4_Reproducibility *Technical notes will be added as needed.
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basic information
Please refer to various technical notes using the mass spectrometry device ASTON. *Technical notes will be added as needed.
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Applications/Examples of results
■Process Condition Monitor (Etching/Film Deposition) ■Endpoint Monitor (Etching/Cleaning) ■Chamber Contamination Monitor ■Residual Gas Analysis of Gas Abatement System ■Environmental Monitor ■Fermentation Process Monitor ■Natural Gas Analysis Monitor
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Company information
Atonarp Inc. is an equipment manufacturer with bases in Japan, the United States, and India. We develop and manufacture high-quality equipment for the semiconductor, natural gas, and pharmaceutical industries.
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