Gas analysis mass spectrometer ASTON Impact

Sampling from atmospheric pressure is OK! Compact high-sensitivity mass spectrometer.

The "ASTON Impact" is a highly sensitive mass spectrometer suitable for process gas monitoring specialized in gas analysis. It is an electronic ionization ion source model that pursues cost performance and ease of use. It is space-saving and capable of monitoring gases from atmospheric pressure regions. Despite its compact size, it has successfully achieved high sensitivity measurements that surpass competitors as a mass spectrometer for process gas monitoring, with a mass range extended up to m/z 285. It features a quadrupole-type compact sensor equipped with an electronic ionization ion source and a secondary electron multiplier, designed with a space-saving packaging that includes a pump. 【Main Applications】 ■ Process condition monitoring (etching, film deposition) ■ Endpoint monitoring (etching, cleaning) ■ Chamber contamination monitoring ■ Residual gas analysis for gas abatement systems ■ Environmental monitoring ■ Fermentation process monitoring ■ Natural gas analysis monitoring ■ Lyophilization (Freeze-Drying) *For more details, please contact sales-jp@atonarp.com.

Analytical Equipment and Devices