Introduction to the Application Note for the Mass Spectrometry Device ASTON
ASTON Impact / ASTON Plasma
We will introduce various applications using the mass spectrometry device ASTON.
We would like to introduce application notes using the mass spectrometry device ASTON. <Application Note List> 1. ASTON Application Note_vol.1_Chamber Cleaning 2. ASTON Application Note_vol.3_Simple Component Analysis of Ethanol 3. ASTON Application Note_vol.2_High Sensitivity Endpoint Detection_Etching Process Monitoring *Application notes will be added as needed.
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basic information
Please refer to various applications using the mass spectrometer ASTON. *Application notes will be added as needed.
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Applications/Examples of results
■Process Condition Monitor (Etching/Film Deposition) ■Endpoint Monitor (Etching/Cleaning) ■Chamber Contamination Monitor ■Residual Gas Analysis of Gas Abatement System ■Environmental Monitor ■Fermentation Process Monitor ■Natural Gas Analysis Monitor
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Company information
Atonarp Inc. is an equipment manufacturer with bases in Japan, the United States, and India. We develop and manufacture high-quality equipment for the semiconductor, natural gas, and pharmaceutical industries.
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![[Analysis Case] Depth Direction Analysis of Degradation Components in GCIB_Ar Cluster Organic Materials](https://image.mono.ipros.com/public/product/image/bdf/2000244276/IPROS3068301994679486790.jpg?w=280&h=280)
![[Analysis Case] Evaluation of Film-Forming Component Encroachment on the Back Surface of the Wafer](https://image.mono.ipros.com/public/product/image/7cd/2000244288/IPROS4584994340989128982.jpg?w=280&h=280)
![Foreign Matter Contamination Prevention Measures - Microparticle Visualization System [Web Demo in Progress]](https://image.mono.ipros.com/public/product/image/310/2001517192/IPROS356544541903119186.PNG?w=280&h=280)