Introduction to the Technical Note of the Mass Spectrometry Device ASTON

ASTON Impact / ASTON Plasma

ATONARP INC.

We will introduce various technical documents using the mass spectrometry device ASTON.

We would like to introduce a technical note using the mass spectrometer ASTON. < List of Technical Notes > 1. ASTON Technical Note_vol.2_Measurement of Krypton in Air 2. ASTON Technical Note_vol.3_Measurement of Tungsten Etching 3. ASTON Technical Note_vol.4_Reproducibility *Technical notes will be added as needed.

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Introduction to the Technical Note of the Mass Spectrometry Device ASTON

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Please refer to various technical notes using the mass spectrometry device ASTON. *Technical notes will be added as needed.

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Applications/Examples of results

■Process Condition Monitor (Etching/Film Deposition) ■Endpoint Monitor (Etching/Cleaning) ■Chamber Contamination Monitor ■Residual Gas Analysis of Gas Abatement System ■Environmental Monitor ■Fermentation Process Monitor ■Natural Gas Analysis Monitor

News about this product（5）

NEW! Mass Spectrometry Device ASTON Application Note Volume 3

  • Catalog news

We have released the third application note for the mass spectrometer ASTON, titled "ASTON Application Note_vol.2_Sensitive Endpoint Detection_Etching Process Monitor." We encourage you to take a look. < List of Application Notes > 1. ASTON Application Note_vol.1_Chamber Cleaning 2. ASTON Application Note_vol.3_Simple Component Analysis of Ethanol 3. ASTON Application Note_vol.2_Sensitive Endpoint Detection_Etching Process Monitor < List of Technical Notes > 1. ASTON Technical Note_vol.2_Measurement of Krypton in Air 2. ASTON Technical Note_vol.3_Tungsten Etching Measurement 3. ASTON Technical Note_vol.4_Reproducibility * Application notes and technical notes will be added as needed.

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NEW! Mass Spectrometry Device ASTON Application Note Volume 2!!

  • Catalog news

We have released the second application note for the mass spectrometry device ASTON, titled "ASTON Application Note_vol.3_Simple Component Analysis of Ethanol." We hope you will take a moment to read it. < List of Application Notes > 1. ASTON Application Note_vol.1_Chamber Cleaning 2. ASTON Application Note_vol.3_Simple Component Analysis of Ethanol < List of Technical Notes > 1. ASTON Technical Note_vol.2_Measurement of Krypton in Air 2. ASTON Technical Note_vol.3_Tungsten Etching Measurement 3. ASTON Technical Note_vol.4_Reproducibility * Application notes and technical notes will be added as needed.

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NEW! Mass spectrometry device ASTON Technical Note Volume 3!!

  • Catalog news

We have published the third technical note for the mass spectrometer ASTON, titled "ASTON Technical Note_vol.4_Reproducibility." We encourage you to read it. < List of Application Notes > 1. ASTON Application Note_vol.1_Chamber Cleaning < List of Technical Notes > 1. ASTON Technical Note_vol.2_Measurement of Krypton in Air 2. ASTON Technical Note_vol.3_Tungsten Etching Measurement 3. ASTON Technical Note_vol.4_Reproducibility * Application notes and technical notes will be added as needed.

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NEW! Mass Spectrometry Device ASTON Technical Note Volume 2!!

  • Catalog news

We have published the second technical note for the mass spectrometry device ASTON, titled "ASTON Technical Note_vol.3_Tungsten Etching Measurement." We encourage you to refer to it. <Application Note List> 1. ASTON Application Note_vol.1_Chamber Cleaning <Technical Note List> 1. ASTON Technical Note_vol.2_Krypton Measurement in Air 2. ASTON Technical Note_vol.3_Tungsten Etching Measurement *Application notes and technical notes will be added as needed.

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Company information

ATONARP

ATONARP INC.

Electronic Components and Semiconductors

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Atonarp Inc. is an equipment manufacturer with bases in Japan, the United States, and India. We develop and manufacture high-quality equipment for the semiconductor, natural gas, and pharmaceutical industries.

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