SCIVAX List of Products and Services

The "Nanoimprint Foundry" offers a comprehensive range of services related to nanoimprinting, from optical design and simulation to mold fabrication and etching. We are advancing the integration of surrounding technologies necessary for practical application and building a unique ultra-fine processing foundry platform. By utilizing our services, it is possible to significantly shorten the development period for new products. Additionally, we can provide each service individually, so please feel free to inquire. [Features] ■ Comprehensive services related to nanoimprinting ■ Individual services are also available *For more details, please refer to the catalog or feel free to contact us.

• Optical Components

The "X-300" is a nano imprinting device capable of both thermal and UV methods, suitable for R&D pilot production. We pursue and achieve high quality, low cost, and high equipment productivity at all stages from R&D to mass production. Our company provides a total solution for nano imprinting aimed at R&D and mass production. 【Features】 ■ Compatible from R&D to pilot production ■ Dual-use for thermal and UV methods ■ High quality ■ Low cost ■ High equipment productivity *For more details, please refer to the catalog or feel free to contact us.

• Optical Components
• Other Physics and Chemistry Equipment
• Other factory equipment

The "4-inch front nano-sized pattern mold" is a Si substrate mold created using cutting-edge semiconductor processes. This product has been designed with the aim of achieving high performance, high quality, and low cost for mass production. Please choose from two types of full molds with 4-inch size holes and pillars according to your application. 【Features】 ■ High performance ■ High quality ■ Low cost *For more details, please refer to the catalog or feel free to contact us.

• Optical Components

Nanoprinting technology alone cannot achieve mass production. Our company is advancing the integration with surrounding technologies necessary for practical application and has established a unique ultra-fine processing foundry platform. By utilizing this foundry service, it is possible to significantly shorten the development period for new products.

• Contract manufacturing

We offer contract services for applying resist and molding on the resist surface using nanoimprint technology on various substrates, including sapphire and silicon substrates. In addition to nanoimprint, we also provide advice on resist, resist coating technology, etching advice, and etching contract services. Please contact the SCIVAX Microfabrication Division (Phone: 044-599-5051, Email: nil-contact@scivax.com) for inquiries.

• Processing Contract

We offer large-area nano-patterned molds (ranging from 4 inches to 12 inches) and nano-patterned molding samples at a low cost. In addition to the ready-made products listed on our website, we also accommodate custom molds or molding samples for contract processing. For more details, please contact the SCIVAX Microfabrication Division (Phone: 044-599-5051, Email: nil-contact@scivax.com).

• Processing Contract

We perform nanoimprint molding of various films and resists tailored to your requirements. We can accommodate a variety of shapes, including honeycomb, moth-eye, and lens arrays. Please use this for considerations regarding the introduction of nanoimprint technology. For inquiries, please contact the Microfabrication Division of SCIVAX (Phone: 044-599-5051, Email: nil-contact@scivax.com).

• Processing Contract

To meet the complex challenges of R&D, the RubiQ Type RD-100 achieves a resin curing method compatible with both heat and UV, as well as a pressurization method for molding, all in a highly flexible modular configuration. Additionally, it provides high takt required for pilot production while also addressing cleanroom measures. We will make proposals tailored to each customer's individual development stage. Please contact the SCIVAX Microfabrication Division (Phone: 044-599-5051, Email: nil-contact@scivax.com) for inquiries.

• Other processing machines

SCIVAX is expected to further enhance its high performance in the future. We are manufacturing molds based on technical evaluations through simulations and devices aimed at improving light transmittance, which is useful for LEDs, organic ELs, solar cells, and more. This time, we have released two types of full molds for holes and pillars in sizes ranging from 4 to 12 inches (φ4” to 12”) that meet high performance, high quality, and low cost. ≪Specifications≫ 【Outer Dimensions】4 to 12 inches φ (please consult us for sizes below 4 inches) 【Pattern】220nm (1/2H) (± about 10.0%) 【Material】Si 【Depth】200nm (± about 5.0%) 【Outer Wall Angle】85 degrees 【Arrangement】Triangular lattice 【Pitch】460nm Please contact the SCIVAX Microfabrication Division (Phone: 044-599-5051, Email: nil-contact@scivax.com).

• Other metal materials
• others
• Other processing machines

From R&D to pilot production, we have addressed all stages, pursuing high quality, low cost, and high production efficiency. The X-300 is an ideal nanoimprint device for full-scale technology development. ■□■Features■□■ ■Processing method: Thermal, UV ■Processing size: Up to 100mm (Thermal φ150mm) ■Minimum displacement resolution: 50nm ■Pressing force: Maximum operating: 50kN ■Mold parallelism adjustment mechanism: Standard equipped ■Resist processing - Control possible with residual film below 5nm - Confirmed durability of 150,000 shots through mold technology development ■Film processing - Product manufacturing through practical lines (cell culture plates) - Capable of various pattern processing from nano to micron At SCIVAX, we provide various proposals for substrate processing using film and resist. Regarding LEDs, various optical elements (optical films), and various electronic devices, we will propose mass production processes tailored to your applications. For other functions and details, please contact the SCIVAX Microfabrication Division (Phone: 044-599-5051, Email: nil-contact@scivax.com).

• Other processing machines