翔栄システム List of Products and Services

We are offering the comprehensive catalog of Shoei System to only five companies! The catalog features a rich lineup including non-contact sensors (capacitive and eddy current), piezo actuators, piezo stages, and more. As professionals in precision positioning technology, we support manufacturing in Japan. For positioning devices using piezo technology, please trust Shoei System. If you would like to receive the comprehensive catalog, please apply through the inquiry form.

• Ammeter
• Sensors

Non-contact sensors that use capacitive technology and eddy current technology each have their own specific advantages and disadvantages depending on various applications. Comparing the two technologies from this perspective can help in selecting the most suitable technology for a given application. Capacitive sensors use an electric field for detection. This electric field is sensitive to any materials present between the probe and the measurement target. Therefore, capacitive sensors need to be used in clean and dry environments. Eddy current sensors use a magnetic field for detection. The magnetic field is not sensitive to materials with moisture in the measurement area (liquids and small particles). For this reason, eddy current sensors are useful in wet and dirty environments. For more details, please contact us or refer to the catalog.

• Sensors

The lifting stage is compatible with vacuum conditions. It can also be delivered in a clean room specification. The stroke is 16mm, the positioning accuracy is 2μm, and the vertical force/replacement ratio is 1:3. Additionally, the straightness/flatness is ±2μm, the maximum feed speed is 20mm/s, the maximum acceleration is 200mm/s squared, the maximum load is Z: 30N, and the weight is 4.5kg. For more details, please contact us or refer to the catalog.

• Sensors

The DT65 rotating stage can accommodate a central hole diameter of up to 8 millimeters. Resolution can be changed. It is compatible with Z-axis assembly. Mechanical and electrical modifications, as well as high vacuum compatibility, are also possible. Cleanroom specifications can be delivered. Additionally, the DT105 can be assembled with the MT105 without using an adapter, and it is compatible with Z-axis assembly using mounting brackets. Mechanical and electrical modifications, as well as vacuum and non-magnetic options, are also available. For more details, please contact us or refer to the catalog.

• Sensors

The KDT105 XY stage with an aperture can be customized for mechanical and electrical modifications. It is also compatible with high vacuum and can be delivered in clean room specifications. Additionally, a non-magnetic option is available, and it comes with limit switches for setting the range of motion. The XYZ-3 axis stage is the MP 84-LM. A non-magnetic option is also available. Furthermore, the KDT180-LM has one motor per axis, with the option to support up to two motors. For more details, please contact us or refer to the catalog.

• Sensors

The MT-53-PM ultra-long stroke piezo stage allows for the change of cable pull direction. It can be combined with multiple units to construct multi-axis stages. It is compatible with vacuum environments. A non-magnetic option is available. Cleanroom delivery specifications are also available. Additionally, the MT84 can support high vacuum environments, cleanroom specifications for delivery, and has a non-magnetic option. Furthermore, the MT105 can be assembled into an XY stage without using an adapter plate, and can also be assembled in the Z direction with mounting brackets. For more details, please contact us or refer to the catalog.

• Sensors

We offer a wide variety of piezo stages with a maximum stroke of over 500μm. They are equipped with built-in capacitive sensors and have a linearity error of less than 0.05%. Upgrade your existing AFM to closed-loop control in just 30 minutes at a low cost. The digital controller makes it easy to change servo parameters (P.I.D. Notch). They can be easily mounted on specific microscopes. For more details, please contact us or refer to the catalog. *This catalog is in English.

• Sensors

It can be used in various environments (it can be used in places where water or oil splashes, at high temperatures, or in a vacuum). It can measure any metal material. Achieves a high resolution of 30nm with eddy current sensors. You can choose from 8 different ranges (custom ranges are also available). For more details, please contact us or refer to the catalog. *This catalog is in English.

• Sensors

Achieves a resolution of 0.2nm with a simple probe (varies by range and response frequency). It does not select the material of the measurement target (can measure conductors, semiconductors, non-conductors, anything). Realizes a long measurement range of 6mm with a capacitance sensor (a range length that can only be achieved by Lion Corporation). Recommended for those seeking stability in sensor output. For more details, please contact us or refer to the catalog. *This catalog is in English.

• Sensors

The SSL-SPD2000 series features high output with a peak output of 2A. It is low cost. It can drive large-capacity piezo actuators at high speed. The output voltage ranges from -10V to +140V, with an average output current of 1.3A. The input and output terminals are BNC, and the dimensions are 260W x 99H x 350mm (D). The operating environment is a temperature range of -10°C to +50°C and humidity below 85% RH. For more details, please contact us or refer to the catalog.

• Sensors

The SSL-140 series is capable of closed-loop control. It features capacitive and strain gauge sensors. It can drive a large-capacity piezo actuator at high speed. It is low cost. The output voltage ranges from 0V to +150V, with an average output current of 300mA. The power supply operates at AC 85-115V, and the input voltage is 0 to +5V. The dimensions are 260mm (W) x 350mm (D) x 132.5mm (H), and the operating environment is a temperature range of -10°C to +50°C, with humidity below 85% RH (without condensation). For more details, please contact us or refer to the catalog.

• Sensors

The SSL-SPD400 series is a low-cost, high-current capacity piezo driver. It is capable of closed-loop control (external). It is low-cost and can drive large-capacity piezo actuators at high speed. An OEM board is available. The output voltage ranges from 0V to +150V, with an average output current of 150mA. The input and output terminals are BNC, and the dimensions are H100 x W180 x D260. The operating environment is a temperature range of -10°C to +50°C and humidity below 85% RH. For more details, please contact us or refer to the catalog.

• Sensors

We offer a variety of products ranging from piezoelectric elements to case-integrated actuators. We also have stacked types, tube types, ring stacked types, and barmorph types available. Maximum stroke of over 270μm. Maximum output force of 70,000N (7,000Kg). Low prices. Short delivery times, with best-selling items available in about one week. By incorporating an optional position sensor, we eliminate creeping and hysteresis. For more details, please contact us or refer to the catalog. *This catalog is in English.

• Sensors

We offer a variety of piezo actuators, from piezo elements to case-integrated actuators. Maximum stroke of over 270μm. Maximum generated force of 70,000N (7,000kg). Low price and short delivery time, with best-selling products available in about one week. By incorporating an optional position sensor, we eliminate creeping and hysteresis. Our piezo stages come in a wide range of options, with a maximum stroke of over 500μm. They feature built-in capacitive sensors with linearity error of less than 0.05%. Upgrade existing AFMs to closed-loop control in just 30 minutes. Affordable pricing. The digital controller allows for easy changes to servo parameters (P.I.D. Notch). They can be easily mounted on specific microscopes. For more details, please contact us or refer to the catalog.

• Sensors

This is a guide to the technical documentation from Shoei System Co., Ltd., which provides current sensors, capacitive sensors, and piezo elements. The document explains the calculation method for the rise time of piezo elements (in the case of a load) in an easy-to-understand manner. *If you would like the document, please download the catalog.*

• Other FA equipment
• Actuator
• Technical and Reference Books

This is a guide to the technical materials from Shoei System Co., Ltd., which provides eddy current sensors, capacitive sensors, and piezo elements. The document explains how to calculate the rise time of piezo actuators (in the case of no load) in an easy-to-understand manner. *If you would like the document, please download the catalog.

• Actuator
• Technical and Reference Books

Standard products support a range from 10nm to 6000nm (6mm)! It can measure any material! It can even measure non-conductors. It is used for wafer thickness measurement and as a precision positioning device. With a resolution of 0.2nm, it is suitable for ultra-fine measurements!!

• Other semiconductor manufacturing equipment
• others

High resolution compatible with vacuum and high-temperature environments! Used for measuring the thickness of metals and the axial runout of rotating bodies. When combined with a piezo actuator, precise positioning becomes possible! We invite you to try the Lion company's eddy current sensors, which have been long favored in the industrial and semiconductor sectors!

• Other semiconductor manufacturing equipment
• others