High-resolution capacitive sensor
Standard products support a range from 10nm to 6000nm (6mm)! It can measure any material! It can even measure non-conductors. It is used for wafer thickness measurement and as a precision positioning device. With a resolution of 0.2nm, it is suitable for ultra-fine measurements!!
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basic information
Standard products support a range from 10nm to 6000nm (6mm)! It can measure any material! Non-conductive materials can also be measured. It is used for wafer thickness measurement and as a precision positioning device. With a resolution of 0.2nm, it is suitable for ultra-fine measurements!!
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Applications/Examples of results
●Wafer thickness measurement ●Rotating body axis runout measurement ●Detection of adhesive on paper ●Non-conductor thickness measurement ●Position detection of the staging stage
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Company information
Shoei System Co., Ltd. operates under the motto of "continuously providing what is necessary for society and aiming for sustained growth together with our customers," specializing in the design and sales of low-cost, optimal servo systems. If you have any issues with applications using precision devices, please feel free to consult with Shoei System! We would like to use all our capabilities to assist you as much as possible.