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When the oil rotary vacuum pump stops, an oil backflow occurs, causing the oil inside the pump to flow back to the vacuum device side. To prevent this, it is necessary to return the pump's intake side to atmospheric pressure after the pump has stopped and the main valve is completely closed. The delayed vacuum solenoid valve is a delayed leak valve that can prevent oil backflow to the vacuum device side not only during normal ON-OFF operations but also during power outages, simply by being installed between the main valve and the pump. It can delay the vacuum break on the pump's intake side until the vacuum pump stops and the main valve is completely closed, thereby protecting the vacuum pump and the vacuum device.