ハイウィン List of Products and Services

Equipped with in-house manufactured key components. All axes are equipped with AC servo motors. The repeatability accuracy is up to ±0.1mm, compatible with 2-12 inch wafers. The robot, which balances high performance and affordability, is not limited to wafer transport; it also offers custom solutions for PCB and glass substrate transport applications, and we can propose transport axes for the robot itself tailored to specifications.

• Transport and handling robots

A new incremental position measurement system has arrived. The analog and digital signal outputs using magnetic principles are resistant to oil, water, and dust, making them unaffected by harsh environmental conditions, allowing for a wide range of industrial applications. The T type enhances LED status indication, making installation and identification easier. The C type and PG type can significantly reduce installation space when combined with guideways. For more details, please refer to the catalog or contact us.

• Distance measuring device

【Features】 ■ Complies with Cleanliness ISO Class 2 environment ■ Smooth operation suitable for positioning and scanning applications ■ Easy installation with standardized modules ■ Capable of long stroke (up to 2.7m)

• Linear motor

This is a linear motor stage with nanometer precision that can be utilized in the advanced processes of semiconductor manufacturing, where technological advancements are progressing. It is suitable for semiconductor inspection equipment and semiconductor manufacturing equipment with stringent technical requirements. By introducing standard models, we provide solutions that shorten our customers' development periods. Our company offers a wide range of in-house components, allowing us to secure all parts and engineers internally, enabling us to achieve design and production lead times that cannot be matched by other companies. We are equipped with three elements: <mechanical component parts>, <mechatronic products>, and <control technology>, allowing us to respond flexibly and quickly not only to standard models but also to custom requests.

• Linear motor
• Wafer
• Other electronic parts

A nano-precision positioning linear motor stage that meets the stringent technical requirements of semiconductor inspection and manufacturing equipment. Positioning stability is ±2nm, with high-speed stability of ±0.1% at 100mm/s. Its low-profile and stable structure make it suitable for high-end precision inspection equipment. This high-precision stage fully demonstrates the technology cultivated through the development and manufacturing of motion control and system technology, contributing to the future of manufacturing.

• Semiconductor inspection/test equipment

High environmental resistance magnetic scale for dust and mist. A new series with a pole pitch of 2mm has arrived. Features: ● Protection rating IP68 ● Space-saving ● Minimum resolution: 1μm ● Repeat positioning accuracy: ±1μm ● Easy confirmation of installation status with LED display ● Easy installation ● Wide range of input voltage ● Reverse voltage protection ● Uses absolute encoder method ○ For more details, please refer to the catalog or contact us.

• Distance measuring device

A modular product that combines our company's single-axis robot, servo system, and controller. It contributes to improved production efficiency and market competitiveness with easy operation and assembly, as well as excellent cost performance. Switching from pneumatic cylinders to this system reduces energy consumption and also contributes to increased productivity by reducing human error. - Cantilever type - Cross type - Movable arm type - Polar coordinate type

• Cartesian Robot

A new series of the wave gear reducer "DATORKER(R)" is being launched one after another. In addition to the standard type, we have added "heavy load type," "moment-resistant type," and "lightweight type" to our lineup. Our wave gear reducers boast high cost performance and can accommodate short delivery times, making them suitable as a purchasing option for multiple companies. They contribute to the establishment of a stable supply chain. Custom-made options are also available, so please feel free to consult us with confidence. This product is compact, lightweight, and easy to assemble. It supports stable high positioning accuracy and offers a wide range of reduction ratios, making it suitable for various industrial robots, measuring instruments, semiconductor manufacturing equipment, machine tools, FA equipment, and other industrial machinery. 【Lineup】 ◎ Standard type: Cup type DSC series, Hollow type DSH series ◎ Heavy load type: Cup type DGC series, Hollow type DGH series ◎ Moment-resistant type: Cup type DSC-M series ◎ Lightweight type: Cup type DLC series ★ We will be exhibiting this product at "JIMTOF," held at Tokyo Big Sight from November 5th. *For more information about the product, please refer to the materials. Feel free to contact us with any inquiries.

• Gearbox

The SSA XY Series Linear Motor Stage is a two-axis linear motor positioning stage that achieves high precision, short delivery times, and excellent cost performance. When used in conjunction with the E1 and E2 drivers, it delivers outstanding speed ripple performance. - Maximum speed: 1500 mm/s - High resolution: 0.1 μm - Excellent repeatability: ±0.5 μm **Features** - Short delivery time - Easy installation - Excellent cost performance - Modular design reduces assembly time - Multi-field bus communication interface - Pulse train/voltage input interface - 3.2 kHz speed response - High precision position control - High precision position trigger output *For more details, please refer to the PDF document or feel free to contact us.*

• Linear motor

The "Underwater Direct Drive Motor Rotary Table" is a rotary table with a direct drive motor that can be used underwater. Thanks to its dustproof and waterproof performance, it can be completely submerged in water or oil, making it suitable for non-contact precision processing equipment in industries such as automotive, semiconductor, and medical precision parts, where high-speed operation, high discharge, and wire cutting are required. We provide a total solution that includes direct drive motors, drivers, precision bearings, and rotary tables. Our platform enables industrial transformation and advancement, creating high value-added products while offering high-quality, energy-saving, and low-carbon solutions. *For more details, please refer to the PDF document or feel free to contact us.

• Other machine tools

Our company is engaged in a wide range of development and manufacturing, from mechanical component parts to mechatronic products. We offer stainless steel linear guideways "MG Series" and ball screws "Super S Series," suitable for the semiconductor and FPD industries, as well as wafer transport robots, EFEM, wafer aligners, and ultra-precision stages at the nano level. We provide everything from components to subsystems in a one-stop solution, significantly reducing costs and man-hours related to procurement. 【We will be exhibiting at SEMICON Japan】 We plan to showcase mechanical component parts such as stainless steel linear guideways and ball screws for semiconductor equipment, as well as wafer robots and wafer load/unload systems. Please feel free to stop by. Date: December 13 (Wed) to 15 (Fri), 2023 Venue: Tokyo Big Sight (Booth No.: East Hall No. 2309)

• Other machine elements

Our company leverages its advantage as a manufacturer of mechanical component parts and mechatronic products to engage in the development and manufacturing of stages for industrial robots and automation equipment, as well as providing support for the introduction of automation and labor-saving solutions. We have numerous achievements in automating pick-and-place and assembly processes using SCARA robots and vertical multi-joint robots. We offer a one-stop solution that includes not only industrial robots but also component parts such as reducers and servo motors, as well as modules and systems. We have established robot technology centers in Kobe and Tokyo, where our technical staff will support system implementation. 【Exhibiting at the 2023 International Robot Exhibition (IREX2023)!】 During the exhibition, you can view various industrial robots, including vertical multi-joint robots and SCARA robots, at our booth. We look forward to your visit. Date: November 29 to December 2, 2023, 10:00 AM to 5:00 PM Venue: Tokyo Big Sight, Booth: East Hall 6 E6-16 *You can view materials on our industrial robots and more from the "PDF Download" section. Please feel free to contact us with any inquiries.

• Articulated Robot

We offer a variety of positioning modules and driver controllers, including AC servo motors, linear motors, DD motors, stages, single-axis robots, and linear units, all in a one-stop solution. We provide flexible combinations tailored to your needs. Since we handle everything from development to production in-house, we can offer competitive pricing. ■【D1/D1-N Series】Driver for DD/Linear Motors ■【HIMC】Programmable Multi-Axis Motion Controller ■【LMDX+】Driver for Flat Servo Motors ■【PCI4P】Pulse Type Motion Board ■【E1 Series】Next-Generation Servo Driver ■【E2 Series】Next-Generation Servo Driver ○ For more details, please refer to the catalog or contact us.

• Software (middle, driver, security, etc.)

The E2 series is a self-lubricating linear guideway. There is a lubrication mechanism between the end cap and the end seal, and a special oil tank that can be replaced is attached to the tip of the block. Oil is supplied from the oil tank to the ball running groove. Internal oil guiding components continuously draw up oil, maintaining the lubrication condition of the block. There are no restrictions on the orientation of the oil tank installation. For more details, please refer to the catalog or contact us. Detailed information can be found in the linear guideway catalog.

• Other machine elements

Ideal for use in high humidity environments and environments requiring corrosion resistance. Compatible with standard carbon steel linear guideways. The model numbers applicable to stainless steel are as follows: HG Series: HGH15, HGH20, HGH25 EG Series: EG15 QH Series: QH15, QH20, QH25 QE Series: QE15 MG Series For more details, please refer to the catalog or contact us.

• Other machine elements

HIWIN's solutions that contribute to your company's ESG initiatives! With HIWIN's electric actuator "single-axis robot," you can significantly reduce power consumption and CO2 emissions compared to pneumatic systems. Additionally, AC servo motors and drivers can be delivered in a short lead time as a set. You can achieve a triple benefit of environmental compliance, reduced labor costs, and savings on electricity bills, all of which are welcome challenges for the workplace.

• Servo motor

The HLP series of the HIWIN Load Port is a shared load port that supports the loading and unloading of 8-inch and 12-inch products, directly compatible with 8-inch and 12-inch FOUP/FOSB. An optional adapter can be selected for 8-inch open cassettes and 12-inch metal carriers.

• Transport and handling robots

The 【CRG Series】 is a linear guideway with a four-row circular arc groove structure. It features high rigidity, high load capacity, and high torsional resistance, while also having load characteristics in four directions simultaneously. You can choose the latest rail dust-proof options. ○ For more details, please refer to the catalog or contact us. Detailed information can be found in the linear guideway catalog.

• Other machine elements

In addition to the "DMTB2・DMTF2" with a thickness of 22mm, we have started accepting orders and sales for the new "DMTK3" with a hollow diameter of 340mm and a thickness of 30mm from June 2023. This reduces the assembly labor for stages. When combined with our linear motor, it enables the relatively easy realization of a high-precision XYΘ stage with an overall height of approximately 250mm. ■ Overwhelming large hollow diameter ■ Excellent positioning accuracy with high resolution ■ No gears and zero backlash ■ High torque due to unique electrical circuit design Product lineup: 【DMTK3】 Hollow diameter 340mm / Thickness 30mm 【DMTB2】 Hollow diameter 140mm / Thickness 22mm 【DMTF2】 Hollow diameter 240mm / Thickness 22mm ○ For more details, please refer to the catalog or contact us.

• Other motors

The "State Visualization System Equipped i4.0 Series" features ball screws (i4.0BS(R)), linear guideways (i4.0GW(R)), and single-axis robots in its lineup. By introducing this series, it enables condition monitoring between devices, display of history, and receipt of alarms. This allows for the incorporation of maintenance plans before issues arise on the production line, thereby maintaining high production efficiency. In the i4.0BS(R), signals from sensors attached to the ball screw are collected by the ECM (Edge Computing Module), which performs intelligent diagnostics using a proprietary diagnostic algorithm (abnormality diagnosis, component fatigue analysis, lubrication condition analysis). Additionally, it allows for automatic log saving and remote monitoring via multiple terminals. It meets the needs for predictive maintenance to maintain production line performance and environmentally conscious clean manufacturing.

• Other machine elements

The Hiwin torque motor rotary table adopts the "Zero Backlash Direct Drive System (zeroB/DD system)." It enables multi-axis synchronized machining, simultaneous 5-axis machining, and the implementation of high-precision indexing tables. It achieves smooth and responsive rotation, enhancing advantages in various aspects such as finishing quality, yield improvement, and operational noise quality, supporting the differentiation of machine tools. ◇ High Performance 　・Adopts a water-cooled motor, allowing for constant high torque output 　・Gearless design enables high-precision positioning 　・Zero backlash reduces transmission loss ◇ High Functionality 　・Minimal wear and clean operation 　・No gear mechanism required, allowing for compact equipment 　・Reduction in the number of parts improves maintenance Please feel free to contact us for more information. ーーーーー Product Lineup ■ RAB Series: 2-axis dual support type ■ RAS Series: 2-axis cantilever type ■ RCV Series: 1-axis vertical type ■ RCH Series: 1-axis horizontal type

• Other machine tools

The new generation E1 series servo driver supports AC servo motors, linear motors, direct drive motors, and more. It meets the application requirements of various industries. It is active in a wide range of industries, including the FPD industry, semiconductor industry, automation industry, laser cutting industry, and PCB industry. *For more details, please refer to the PDF materials or feel free to contact us.*

• Amplifier

Magnetic scales with high environmental resistance to dust and mist. A new series with a pole pitch of 2mm has been introduced. Features: ● Compact size ● Maximum resolution: 1μm ● Maximum repeatability: ±1μm ● Maximum detection gap of 0.8mm ● Capable of supporting lengths up to 30m ● Easy installation ● Protection rating: IP67 ○ For more details, please refer to the catalog or contact us.

• Distance measuring device

The HPA series of the HIWIN Pre-Aligner is a 3-axis controlled product that utilizes HIWIN's single-axis robot module, achieving high speed, high precision, high rigidity, high efficiency, and space-saving design. With an integrated controller design (all-in-one), there is no need for external controller placement or wiring space, making it the smallest in volume in its class. It is equipped with an intelligent translucent laser sensor that can detect the contours of objects such as transparent, translucent, and opaque materials. It can accommodate wafers and glass with a minimum diameter of 2 inches and a maximum of 12 inches.

• Transport and handling robots

This document provides a detailed introduction to the "AC Servo Motor [E Series]" handled by Hiwin Corporation. This product is a next-generation motor solution that achieves high performance and excellent cost performance. When used in conjunction with the E2 series driver, it is possible to maximize the motor's performance. While motors are experiencing longer lead times globally, Hiwin is capable of offering short lead times. [Contents (Excerpt)] ■ Features ■ Model Number ■ Specifications List ■ Interface Overview *For more details, please refer to the PDF document or feel free to contact us.

• AC Motor

AC servo motors, essential for automation and labor-saving needs, are facing longer delivery times globally. With Hiwin, short delivery times are possible. We offer a lineup with rated outputs ranging from 50 to 2000W, and we can provide our drivers as a one-stop solution. Please feel free to contact us. ーーーーー Product Lineup ■ FRLS Series: Low inertia, low capacity ■ FRMS Series: Medium inertia, low capacity ■ FRMM Series: Medium inertia, medium capacity ■ <New Generation> E1 Series: High speed, high resolution

• AC Motor

Hiwin products are not just linear and rotary components. In addition to various motors and drivers, we take pride in our diverse product lineup, which includes industrial robots and ultra-precision positioning stages. Here, we will introduce products that help address the challenges of differentiation and evolution in machine tools. Hiwin's strength lies in our ability to propose solutions that reduce your labor hours from various perspectives, including not only the evolution of functionality but also design and development man-hours, as well as purchasing, assembly, quality assurance, and production management.

• Power Transmission Equipment

HIWIN DD motors adopt a direct drive system that does not require a reduction mechanism. The motor is coupled to the load with high rigidity through cross roller bearings, achieving excellent acceleration and motion stability through servo driver control. Cables and related accessories can be connected through a hollow shaft, making it suitable for a wide range of applications such as automation tasks. ■ No backlash ■ Hollow shaft ■ No rotational friction from gears ■ Compact ■ Maintenance-free ■ High rigidity cross roller bearings ■ TMS series has an IP65 protection rating ■ Built-in brake available (optional) ■ Hall sensor available (optional) Product lineup: 【DMS Series】Inner rotor type DD motor 【DMY Series】Outer rotor type DD motor 【DMN Series】Thin outer rotor type DD motor 【DMT Series】Ultra-thin large hollow diameter DD motor 【TM-2 Series】Water-cooled torque motor 【IM-2 Series】Water-cooled torque motor ○ For more details, please refer to the catalog or contact us.

• Other motors

The Hiwin torque motor is a direct drive system that does not require a reduction mechanism. Its water-cooled design makes it ideal for use with high torque. Additionally, it achieves high-precision positioning and zero backlash without gears. This contributes to the miniaturization of devices and improved maintenance. The motor is coupled with the load through a cross roller bearing for high rigidity, and outstanding acceleration and motion stability are achieved through servo driver control. Cables and related accessories can be connected through the hollow shaft, making it suitable for a wide range of applications, including automation tasks. For more details, please refer to the catalog or contact us.

• Other motors

The DRA series is a rotary actuator that combines the wave gear reducer DATORKER(R) with an AC servo motor. It achieves high torque and high precision while being compact, and it can be easily assembled. *For more details, please refer to the PDF materials or feel free to contact us.*

• Gearbox

The HIWIN i4.0BS(R) is a system that continuously monitors the information from sensors attached to ball screws using an ECM (Edge Computing Module) and visualizes the condition of the ball screws through a unique diagnostic algorithm. With the introduction of the i4.0 series, production managers can perform abnormal diagnosis, component fatigue analysis, and lubrication control. ■ Features - Vibration Monitoring: Detects abnormal vibrations and shocks to prevent damage to equipment and components. - Temperature Monitoring: Detects temperature rises to prevent processing accuracy fluctuations due to thermal expansion. - Lifetime Prediction: Predicts maintenance timing while diagnosing preloading conditions. - Smart Lubrication: Prevents lubrication shortages with automatic oil supply while saving oil quantity, contributing to environmental protection. ○ For more details, please download the PDF or contact us.

• Other machine elements

Not just linear and rotary components! We cover everything from motors and drivers to electronic components, industrial robots, and ultra-precise positioning stages. We offer proposals to reduce your company's labor in as many areas as possible, including not only design and development but also purchasing, assembly, quality assurance, and production management. ◎ Your company can focus on research to enhance core technologies. ◎ Prototype and evaluation tasks will be handled by Hiwin. ◎ We respond with well-equipped production facilities and testing and analysis systems.

• Other machine elements

HIWIN DD motors adopt a direct drive system that does not require a reduction mechanism. The motor is rigidly coupled to the load through cross roller bearings, achieving excellent acceleration and motion stability through servo driver control. Cables and related accessories can be connected through a hollow shaft, making it suitable for a wide range of applications such as automation tasks. ■ No backlash ■ Hollow shaft ■ No rotational friction from gears ■ Compact ■ Maintenance-free ■ High rigidity cross roller bearings ■ Built-in brake available (optional) ■ Hall sensor available (optional) Product lineup: 【DMS Series】Inner rotor type DD motor 【DMY Series】Outer rotor type DD motor 【DMN Series】Thin outer rotor type DD motor 【DMT Series】Ultra-thin large hollow diameter DD motor 【DMH Series】Inner rotor type DD motor ○ For more details, please refer to the catalog or contact us.

• Other motors

The "Torque Motor Rotary Table" achieves high speed and high torque through a water-cooled direct drive motor. It also features high rigidity and high precision bearings, absolute encoders, and powerful brakes, resulting in a high-performance rotary table. By using a direct drive motor, it achieves high-speed rotation in addition to operating torque comparable to worm gears and roller cam systems. By minimizing thermal deformation, it also achieves high dynamic response and precision. Combined with zero backlash and zero friction characteristics, the reliability of the rotary table is enhanced, adding value. It is also suitable for overhauls and retrofits! 【Features】 ■ 1-axis horizontal type ■ Index table ■ For milling, turning, and grinding processing in a combined machine ■ Modular design and simple structure of the DD motor ■ High compatibility with customizable table size changes to meet needs ■ High speed, high rigidity, and advanced positioning accuracy ■ High productivity due to efficiency improvements ■ Simple structure, zero backlash, high stability, and long lifespan ■ Compatible with NC devices from major manufacturers *For more details, please refer to the PDF document or feel free to contact us.

• Other machine tools

The "Torque Motor Rotary Table" achieves high speed and high torque through a water-cooled direct drive motor. It also features high rigidity and high precision bearings, absolute encoders, and powerful brakes, resulting in a high-performance rotary table. By using a direct drive motor, it realizes high-speed rotation in addition to operating torque comparable to worm gears and roller cam systems. By minimizing thermal deformation, it also achieves high dynamic response and precision. Combined with zero backlash and zero friction characteristics, the reliability of the rotary table is enhanced, adding value. Suitable for overhauls and retrofits as well! 【Features】 ■ Single-axis vertical type ■ Ideal for 3+1 axes ■ Modular design and simple structure of the DD motor ■ High compatibility with table size changes to meet needs ■ High speed, high rigidity, and advanced positioning accuracy ■ High productivity due to efficiency improvements ■ Simple structure, zero backlash, high stability, and long lifespan ■ Compatible with NC devices from major manufacturers *For more details, please refer to the PDF document or feel free to contact us.

• Other machine tools

The "Torque Motor Rotary Table" achieves high speed and high torque through a water-cooled direct drive motor. It also features high rigidity and high precision bearings, absolute encoders, and powerful brakes to realize a high-performance rotary table. By using a direct drive motor, it achieves high-speed rotation in addition to operational torque comparable to worm gears and roller cam mechanisms. By minimizing thermal deformation, it also achieves high dynamic response and precision. Combined with zero backlash and zero friction characteristics, the reliability of the rotary table is enhanced, adding value. 【Features】 ■ 2-axis cantilever type ■ Compact design ■ High-speed synchronous processing ■ Modular design and simple structure of the DD motor ■ High compatibility with customizable table size changes to meet needs ■ High speed, high rigidity, and advanced positioning accuracy ■ High productivity due to efficiency improvements ■ Simple structure, zero backlash, high stability, and long lifespan ■ Compatible with NC devices from major manufacturers *For more details, please refer to the PDF document or feel free to contact us.

• Other machine tools

The "Torque Motor Rotary Table" achieves high speed and high torque through a water-cooled direct drive motor. It also features high rigidity and high precision bearings, absolute encoders, and powerful brakes, resulting in a high-performance rotary table. By using a direct drive motor, it not only achieves operating torque comparable to worm gears and roller cam systems but also enables high-speed rotation. By minimizing thermal deformation, it also achieves high dynamic response and accuracy. Combined with zero backlash and zero friction characteristics, the reliability of the rotary table is enhanced, adding value. 【Features】 ■ Dual-axis supported type ■ Suitable for simultaneous 5-axis machining ■ Modular design and simple structure of the DD motor ■ High compatibility with customizable table size changes to meet needs ■ High speed, high rigidity, and advanced positioning accuracy ■ High productivity due to efficiency improvements ■ Simple structure, zero backlash, high stability, and long lifespan ■ Compatible with NC devices from major manufacturers *For more details, please refer to the PDF document or feel free to contact us.

• Other machine tools

The i4.0BS equipped with a state visualization system is a system that continuously monitors the information from temperature and vibration sensors attached to the ball screw using an ECM (Edge Computing Module) to visualize the condition of the ball screw.

• Other machine elements

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