Achieving high speed, high precision, high rigidity, high efficiency, and space-saving! The 【HIWIN Wafer Aligner】 compatible with 2-12 inches.
The HPA series of the HIWIN Pre-Aligner is a 3-axis controlled product that utilizes HIWIN's single-axis robot module, achieving high speed, high precision, high rigidity, high efficiency, and space-saving design. With an integrated controller design (all-in-one), there is no need for external controller placement or wiring space, making it the smallest in volume in its class. It is equipped with an intelligent translucent laser sensor that can detect the contours of objects such as transparent, translucent, and opaque materials. It can accommodate wafers and glass with a minimum diameter of 2 inches and a maximum of 12 inches.
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basic information
- Lineup compatible with 2-12 inches - Wafer alignment possible in as short as 4.9 seconds - Correction operations for wafer center and angle can be performed simultaneously, achieving a repeatability accuracy of ±0.1 mm - Cleanliness Class 1
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Applications/Examples of results
Alignment in the semiconductor industry (wafers), LED industry (sapphire substrates), and optoelectronics industry (glass), etc.
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Company information
HIWIN is a global company headquartered in Taichung, Taiwan, with a capital of approximately 15.8 billion yen and around 4,500 employees. In addition to Japan, it has bases in 12 countries worldwide, including Germany and the United States. As a world-class manufacturer of linear motion equipment, HIWIN focuses on product development to meet the diverse needs of its customers, accumulating a track record of supplying to leading machine tool manufacturers, automotive manufacturers, and semiconductor and manufacturing equipment manufacturers, and advancing as a preferred partner company. (ISO9001, ISO14001, ISO45001 certified) Furthermore, HIWIN develops and manufactures a wide range of mechatronic products, providing solutions that extend beyond merely being a parts manufacturer to various industries. Established in 1999, HIWIN Corporation, the Japanese subsidiary, is based in Kobe City, Hyogo Prefecture, and has sales offices in 10 cities across Japan. In 2022, it established a headquarters factory with research and development capabilities on a site of approximately 7,500 tsubo in Kobe City. Moving forward, our company will demonstrate expertise in each field and strive to provide optimal solutions to our customers through the manufacturing and development of valuable products, contributing to the development of Japan's industry as a company that "supports next-generation manufacturing."