テクノクオーツ List of Products and Services

Technocrafts provides high-precision quartz glass, silicon, and ceramics products mainly used in semiconductor and liquid crystal manufacturing equipment, as well as scientific instruments. This document introduces the "internal flow gas shower plate," which allows gas and liquids to flow in, along with accompanying photos. <Tecnocrafts Technical Features> - It is possible to form precise hollow patterns inside quartz glass. - It is possible to bond with strength equivalent to bulk without deforming the shape. - There is a production record for product sizes up to ¢500mm. - Direct bonding of quartz glass components is possible by utilizing thermal diffusion, etc. *For more details, please download the PDF or contact us.

• Processing Contract

Our company processes quartz glass products for semiconductor manufacturing processes and scientific applications based on the technology and experience cultivated in fields with high-quality requirements. We are capable of producing large products in the 1-meter class and products with complex grooves and holes inside through diffusion bonding technology. Quartz glass is of high purity and possesses heat resistance (up to 1000°C), chemical resistance, and excellent light transmittance. Additionally, we have manufacturing technology that allows for the separation of porous coatings from the substrate without causing damage, enabling the production of thin sheets and tubular products using silicon and ceramic materials. 【Features】 ◎ Quartz Glass ■ We accommodate both machined and fire-processed products. ■ Capable of producing large quartz glass jigs. ◎ Porous Structures ■ It is possible to use different materials on the front and back of the molded object. ■ Various shapes can be accommodated by forming a membrane. *For more details, please refer to the materials. We also offer consultation for prototype development.

• Glass
• Other polymer materials

The manufacturing technology for "porous structures (self-supporting membranes)" is a new technique that allows for the separation of a porous coating film from the substrate without causing damage. It can be made into thin sheets, tubes, or bowl shapes using silicon or oxide-based ceramics, regardless of the shape. Compared to traditional machining methods, it allows for material reduction without waste. 【Features】 ■ Standard thickness: 0.2mm to 0.5mm (subject to consultation) ■ Porosity: a few percent to 20% ■ Functional patterns can be formed on the surface of the structure ■ Hybrid materials made of different materials can be manufactured ■ Excellent heat resistance and chemical resistance *For more details, please download the catalog or contact us.

• Ceramics
• Other polymer materials

Quartz glass is a high-purity material with excellent chemical resistance, heat resistance, and ultraviolet transmission. ● Ultra-precision machining enables the formation of small-diameter holes and 3D microchannels. ● MENS technology allows for the formation of fine channel patterns. ● Multi-layer bonding of quartz glass enables the formation of internal channels. For more details, please download the catalog or contact us.

• Semiconductor inspection/test equipment
• Glass

At Technoquartz Corporation, we conduct regular cleaning of various parts used in the semiconductor manufacturing process.

• Surface treatment contract service
• Other contract services

CVD yttria is a high-purity, transparent protective film with excellent plasma resistance.

• Surface treatment contract service

By utilizing thermal diffusion, it is possible to directly bond quartz glass components together.

• Processing Contract

It is possible to form fine pins and achieve ultra-flat finishing on SiC and alumina substrates. 【Features】 ○ Pins can be produced with a diameter of φ0.1mm or more ○ Pin area occupancy ratio of 1% or less ○ Overall flatness of 0.3μm or less (within a φ300mm surface) ○ Reprocessing of the worn surface is possible ● For more details, please contact us or refer to the catalog.

• Processing Contract

Technological expansion, applied processed products.

• Processing Contract
• Glassware and containers

We have a variety of materials, including quartz glass.

• Processing Contract
• Other electronic parts

At Techno Quartz, we are actively working on the production of super-large products by introducing ultra-large electric furnaces and large machining equipment to meet a wide range of needs.

• Processing Contract

Quartz glass and silicon products widely used in semiconductor manufacturing processes.

• Processing Contract
• Other semiconductor manufacturing equipment

A representative product of precision machining is "ring products." The process begins with cutting the material and progresses through multiple grinding processes to shape the final product. In recent years, in response to the increasing diameter of wafers, we are also promoting the expansion of machining equipment, similar to burner fire processing, and we are capable of producing large quartz glass jigs. 【Features】 - Ultra-precision grinding in the sub-micron order using the latest equipment from large materials - Our main products are ring products, and we also handle screws made of quartz glass - We have accumulated cutting-edge processing equipment and technology to meet customer demands *For more details, please contact us or download the catalog.

• Processing Contract
• Other machine elements

Large electric furnace for vertical reaction tubes to accommodate large diameters.

• Processing Contract
• Other semiconductor manufacturing equipment

Our company has adopted a "dry cleaning method" as an environmentally friendly cleaning approach. This reduces reliance on wet cleaning, which generates large amounts of waste liquid, and aims to improve quality, delivery times, costs, and safety. In the case of the dry method, there is almost no wear on the parts due to cleaning.

• Other contract services
• Surface treatment contract service

This is an announcement about "microfabrication technology" from Techno Quartz Co., Ltd.

• Processing Contract

"CVD Yttria" is a transparent protective film with excellent plasma resistance. It is a dense film with high adhesion, making it effective as a protective film for windows used in plasma treatment processes (F-based, Cl-based).

• Surface treatment contract service